JPH0449240B2 - - Google Patents
Info
- Publication number
- JPH0449240B2 JPH0449240B2 JP16704185A JP16704185A JPH0449240B2 JP H0449240 B2 JPH0449240 B2 JP H0449240B2 JP 16704185 A JP16704185 A JP 16704185A JP 16704185 A JP16704185 A JP 16704185A JP H0449240 B2 JPH0449240 B2 JP H0449240B2
- Authority
- JP
- Japan
- Prior art keywords
- rays
- magnetic field
- soft
- plasma
- waves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 11
- 239000002131 composite material Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 230000005855 radiation Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000004846 x-ray emission Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 230000005461 Bremsstrahlung Effects 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000002083 X-ray spectrum Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Landscapes
- X-Ray Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16704185A JPS6226752A (ja) | 1985-07-29 | 1985-07-29 | 高強度軟ｘ線発生方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16704185A JPS6226752A (ja) | 1985-07-29 | 1985-07-29 | 高強度軟ｘ線発生方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226752A JPS6226752A (ja) | 1987-02-04 |
| JPH0449240B2 true JPH0449240B2 (enExample) | 1992-08-10 |
Family
ID=15842286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16704185A Granted JPS6226752A (ja) | 1985-07-29 | 1985-07-29 | 高強度軟ｘ線発生方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6226752A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5388018B2 (ja) * | 2007-05-07 | 2014-01-15 | 独立行政法人日本原子力研究開発機構 | レーザー駆動の小型・高コントラスト・コヒーレントｘ線発生装置及びその発生方法 |
| JP5754699B2 (ja) * | 2010-09-30 | 2015-07-29 | 学校法人 関西大学 | 半導体リソグラフィ用光源装置 |
-
1985
- 1985-07-29 JP JP16704185A patent/JPS6226752A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6226752A (ja) | 1987-02-04 |
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