JPS62267482A - 真空用金属部品 - Google Patents

真空用金属部品

Info

Publication number
JPS62267482A
JPS62267482A JP11194786A JP11194786A JPS62267482A JP S62267482 A JPS62267482 A JP S62267482A JP 11194786 A JP11194786 A JP 11194786A JP 11194786 A JP11194786 A JP 11194786A JP S62267482 A JPS62267482 A JP S62267482A
Authority
JP
Japan
Prior art keywords
vacuum
oxide film
purity
aluminum layer
purity aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11194786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328515B2 (OSRAM
Inventor
Yutaka Kato
豊 加藤
Eizo Isoyama
礒山　永三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP11194786A priority Critical patent/JPS62267482A/ja
Publication of JPS62267482A publication Critical patent/JPS62267482A/ja
Publication of JPH0328515B2 publication Critical patent/JPH0328515B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP11194786A 1986-05-15 1986-05-15 真空用金属部品 Granted JPS62267482A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11194786A JPS62267482A (ja) 1986-05-15 1986-05-15 真空用金属部品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11194786A JPS62267482A (ja) 1986-05-15 1986-05-15 真空用金属部品

Publications (2)

Publication Number Publication Date
JPS62267482A true JPS62267482A (ja) 1987-11-20
JPH0328515B2 JPH0328515B2 (OSRAM) 1991-04-19

Family

ID=14574134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11194786A Granted JPS62267482A (ja) 1986-05-15 1986-05-15 真空用金属部品

Country Status (1)

Country Link
JP (1) JPS62267482A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008081748A1 (ja) * 2006-12-28 2010-04-30 国立大学法人東北大学 半導体又は平面デイスプレイの製造装置に使用される構造部材とその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156277A (ja) * 1984-08-27 1986-03-20 Hitachi Ltd 成膜装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156277A (ja) * 1984-08-27 1986-03-20 Hitachi Ltd 成膜装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008081748A1 (ja) * 2006-12-28 2010-04-30 国立大学法人東北大学 半導体又は平面デイスプレイの製造装置に使用される構造部材とその製造方法
US8642187B2 (en) 2006-12-28 2014-02-04 National University Corporation Tohoku University Structural member to be used in apparatus for manufacturing semiconductor or flat display, and method for producing the same

Also Published As

Publication number Publication date
JPH0328515B2 (OSRAM) 1991-04-19

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