JPS62265519A - 三次元測定機 - Google Patents

三次元測定機

Info

Publication number
JPS62265519A
JPS62265519A JP10924286A JP10924286A JPS62265519A JP S62265519 A JPS62265519 A JP S62265519A JP 10924286 A JP10924286 A JP 10924286A JP 10924286 A JP10924286 A JP 10924286A JP S62265519 A JPS62265519 A JP S62265519A
Authority
JP
Japan
Prior art keywords
axis direction
base
axis
stage
document table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10924286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04526B2 (enrdf_load_stackoverflow
Inventor
Matsushiro Fujitani
藤谷 松四郎
Ichiro Mizuno
一郎 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP10924286A priority Critical patent/JPS62265519A/ja
Publication of JPS62265519A publication Critical patent/JPS62265519A/ja
Publication of JPH04526B2 publication Critical patent/JPH04526B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP10924286A 1986-05-12 1986-05-12 三次元測定機 Granted JPS62265519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10924286A JPS62265519A (ja) 1986-05-12 1986-05-12 三次元測定機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10924286A JPS62265519A (ja) 1986-05-12 1986-05-12 三次元測定機

Publications (2)

Publication Number Publication Date
JPS62265519A true JPS62265519A (ja) 1987-11-18
JPH04526B2 JPH04526B2 (enrdf_load_stackoverflow) 1992-01-07

Family

ID=14505215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10924286A Granted JPS62265519A (ja) 1986-05-12 1986-05-12 三次元測定機

Country Status (1)

Country Link
JP (1) JPS62265519A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5339531A (en) * 1992-01-30 1994-08-23 Tokyo Seimitsu, Co., Ltd. Coordinate measuring machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5339531A (en) * 1992-01-30 1994-08-23 Tokyo Seimitsu, Co., Ltd. Coordinate measuring machine

Also Published As

Publication number Publication date
JPH04526B2 (enrdf_load_stackoverflow) 1992-01-07

Similar Documents

Publication Publication Date Title
US6058618A (en) Coordinate measuring machine
US4852267A (en) Coordinate measuring machine having a guide section for a column of a measuring member support body
JP3325077B2 (ja) 電磁式アライメント装置
JPS6327710A (ja) 直角座標測定機
GB1354130A (en) Apparatus for supporting and accurately positioning an object
KR101330468B1 (ko) 삼차원 형상 측정장치
CN219574594U (zh) 一种一维运动装置
CN211373497U (zh) 一种立式干涉仪升降调整架机构
TWI260646B (en) X-Y axis stage device
JPS62265519A (ja) 三次元測定機
JPH0421051Y2 (enrdf_load_stackoverflow)
JPH0422253Y2 (enrdf_load_stackoverflow)
JPH044168Y2 (enrdf_load_stackoverflow)
JPH07139936A (ja) 座標測定機
JPS62265520A (ja) 2つの検出子を備えた三次元測定機
JPS60127932A (ja) Xyステ−ジ
JPH0548087Y2 (enrdf_load_stackoverflow)
JPH0651809U (ja) ブリッジ型座標測定機
JPH0449530Y2 (enrdf_load_stackoverflow)
JPH0525789Y2 (enrdf_load_stackoverflow)
JP5292668B2 (ja) 形状測定装置及び方法
CN218066356U (zh) 可调整z轴方向测量范围的轮廓测量仪
JPH04136705A (ja) 位置決ステージ
JPS60224010A (ja) 自動三次元測定機
CN220751944U (zh) 一种直线运动平台及显微镜检测装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees