JPS6226459Y2 - - Google Patents

Info

Publication number
JPS6226459Y2
JPS6226459Y2 JP1982009231U JP923182U JPS6226459Y2 JP S6226459 Y2 JPS6226459 Y2 JP S6226459Y2 JP 1982009231 U JP1982009231 U JP 1982009231U JP 923182 U JP923182 U JP 923182U JP S6226459 Y2 JPS6226459 Y2 JP S6226459Y2
Authority
JP
Japan
Prior art keywords
wafer
substrate holder
substrate
holder
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982009231U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58111942U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP923182U priority Critical patent/JPS58111942U/ja
Publication of JPS58111942U publication Critical patent/JPS58111942U/ja
Application granted granted Critical
Publication of JPS6226459Y2 publication Critical patent/JPS6226459Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP923182U 1982-01-26 1982-01-26 Ｌｐｅ膜成長用基板ホルダ Granted JPS58111942U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP923182U JPS58111942U (ja) 1982-01-26 1982-01-26 Ｌｐｅ膜成長用基板ホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP923182U JPS58111942U (ja) 1982-01-26 1982-01-26 Ｌｐｅ膜成長用基板ホルダ

Publications (2)

Publication Number Publication Date
JPS58111942U JPS58111942U (ja) 1983-07-30
JPS6226459Y2 true JPS6226459Y2 (OSRAM) 1987-07-07

Family

ID=30021884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP923182U Granted JPS58111942U (ja) 1982-01-26 1982-01-26 Ｌｐｅ膜成長用基板ホルダ

Country Status (1)

Country Link
JP (1) JPS58111942U (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533641Y2 (OSRAM) * 1977-05-17 1980-08-09
JPS5540209U (OSRAM) * 1978-09-07 1980-03-14

Also Published As

Publication number Publication date
JPS58111942U (ja) 1983-07-30

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