JPS62261157A - Package for semiconductor device - Google Patents
Package for semiconductor deviceInfo
- Publication number
- JPS62261157A JPS62261157A JP61105362A JP10536286A JPS62261157A JP S62261157 A JPS62261157 A JP S62261157A JP 61105362 A JP61105362 A JP 61105362A JP 10536286 A JP10536286 A JP 10536286A JP S62261157 A JPS62261157 A JP S62261157A
- Authority
- JP
- Japan
- Prior art keywords
- point glass
- low
- sealing
- melting
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 18
- 239000011521 glass Substances 0.000 claims abstract description 25
- 238000002844 melting Methods 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 abstract description 15
- 230000008018 melting Effects 0.000 description 15
- 230000000694 effects Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/15165—Monolayer substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/163—Connection portion, e.g. seal
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
不発L!Aは半導体表置用パッケージに関し、特に低融
点ガラスにより刺止する半導体装置用パッケージの形状
に胸する。[Detailed description of the invention] [Industrial application field] Misfire L! A relates to packages for mounting semiconductors, and is particularly concerned with the shape of packages for semiconductor devices that are pierced with low-melting glass.
し従来の技俯〕
従来、この種の半導体装置用パッケージは、第2図に示
す様に、半導体ダイlをベース部2にマクントし、これ
ら半導体ダイ1とベース部2との間eホンディングワイ
ヤ3によりボンディングした後に、キャップ部4t−低
融点ガラス5で接着していた。[Conventional Techniques] Conventionally, this type of semiconductor device package, as shown in FIG. After bonding with the wire 3, the cap portion 4t was bonded with the low melting point glass 5.
上述した従来の半導体装置用パッケージは、刺止強度が
低融点カラスの量に依存し、低融点ガラスの倉が少ない
と封止強度が低くなる。−万、刺止強度を上げるために
低融点カラス量を多くすると、低融点jjシスか第2図
に示す様にパッケージの外側にtよ不出してしlい、半
導体装置の選別工程中、特にオートへ/トノ−で選別全
行なう時などに、半導体装置用パッケージ外には不出し
た低融点カラスにm依胃撃が加わり、低融点カラスにク
ンツクが入り、封止不良になり易いといり欠点がある。In the conventional semiconductor device package described above, the puncture strength depends on the amount of low-melting glass, and the sealing strength decreases when there is a small amount of low-melting glass. - If the amount of low-melting point glass is increased to increase the puncture strength, the low-melting point glass will not stick out to the outside of the package as shown in Figure 2, and during the selection process of semiconductor devices, In particular, when all sorting is done automatically or with a tonneau, the low melting point glass that has not left the semiconductor device package is subject to stomach shock, and the low melting point glass is likely to get stuck, resulting in poor sealing. There are some drawbacks.
本発明の目的は、このような従来の欠点を除き、低融点
カンスによる封止時にのにみ出しがなく、封止不良をな
くすようにした半導体装置用パッケージ?i−提供する
ことにある。It is an object of the present invention to provide a package for a semiconductor device that eliminates such conventional drawbacks, eliminates leakage during sealing with a low melting point can, and eliminates sealing defects. i- To provide.
本発明の半導体装置用パッケージのfIl底は、半導体
素子を実装したベース部とこのベース部を覆うキャップ
部とを低融点ガラスにより封止する半導体装置用パッケ
ージにおいて、前記キャップ部あるいは前記ベース部の
一方またはこれらキャップ部とベース部の両方の封止部
分側の外周が面取りされたことを特徴とする。The fl bottom of the semiconductor device package of the present invention is a semiconductor device package in which a base portion on which a semiconductor element is mounted and a cap portion covering the base portion are sealed with low melting glass. It is characterized in that the outer periphery of one or both of the cap part and the base part on the side of the sealing part is chamfered.
次に本発明について図Ifiを参照して説明する。 Next, the present invention will be explained with reference to FIG. Ifi.
第1図(a)〜(d)は本発明の4つの実施例の断面図
である。ます、第1図(a)においては、ベース部2a
の封止部側の外周を面取りして、キャップ部4を低融点
カラス5aで封止している。この低融点ガラス58は而
取りをした部分に沿って広がるため、面取りをしていな
い場合と同じ童の低融点ガラスを用いても、封止後に低
融点ガラス5aがパッケージの外側にμはみ出δ丁、ま
た、低融点ガラス5aとベース部2aの接着面積は面取
シをしていないものより大きくなっているために封止強
度はむしろ向上する。FIGS. 1(a) to 1(d) are cross-sectional views of four embodiments of the present invention. In FIG. 1(a), the base portion 2a
The outer periphery of the sealing part side is chamfered, and the cap part 4 is sealed with a low melting point glass 5a. Since this low melting point glass 58 spreads along the chamfered part, even if the same low melting point glass as in the case where no chamfering is used, the low melting point glass 5a protrudes μ to the outside of the package after sealing. Moreover, since the bonding area between the low melting point glass 5a and the base portion 2a is larger than that without chamfering, the sealing strength is rather improved.
第1図(b)は本発明の第2の実施例の断面図で、ベー
ス部2bの而取りの形状t#tXするように変えて低融
点ガラス5bと接着したもので、同様の効果が得られる
。FIG. 1(b) is a cross-sectional view of a second embodiment of the present invention, in which the shape of the base portion 2b is changed to t#tX and the base portion 2b is bonded to a low melting point glass 5b, and the same effect can be obtained. can get.
第1図(C)、第1図(d)は本発明の第3 、fJI
J4の実施例の断面図である。面取りをキャップN4a
t4bおよびベース部2c、2dの両方共行って低融点
ガラス5c、5dと接着したもので、これらの場合は効
果が更に増大する。FIG. 1(C) and FIG. 1(d) are the third embodiment of the present invention, fJI
It is a sectional view of the example of J4. Cap chamfer N4a
Both t4b and base portions 2c and 2d are bonded to low melting point glasses 5c and 5d, and in these cases the effect is further enhanced.
以上説明したように、本発明は、キャップ部か、ベース
部または、キャップ部、ベース部両方の封止部側の外周
を面取りすることによシ、封止に用いる低融点ガラスが
半導体装置用パッケージの外側にはみ出ず、低融点ガラ
スに直接衝撃が加わることを防ぎ、かつ封止強度を向上
するという効果がある。As explained above, the present invention has the advantage that by chamfering the outer periphery of the cap portion, the base portion, or both the cap portion and the base portion on the side of the sealing portion, the low melting point glass used for sealing can be used for semiconductor devices. It does not protrude outside the package, prevents direct impact from being applied to the low melting point glass, and has the effect of improving sealing strength.
第1図(a)〜(dJは本発明の4つの実施例を示す半
導体装置用パッケージの断面図、第2図μ従来の半導体
装置用パッケージの断面図である。
1・・・・・・半導体ダイ、2.2a〜2d・・・・・
・ベース部、3・・・・・・ボンディングワイヤ、4,
4a、4b・・・・・・キャップ部、5.5a〜5d・
・・・・・を融点ガラス。
代理人 弁理士 内 原 ”パ
目。
午/ @ (C) 牛l盟((1)へ′−ス遮)
尋 2 図FIGS. 1(a) to dJ are cross-sectional views of semiconductor device packages showing four embodiments of the present invention, and FIG. 2 μ is a cross-sectional view of a conventional semiconductor device package. 1... Semiconductor die, 2.2a to 2d...
・Base part, 3...Bonding wire, 4,
4a, 4b... Cap part, 5.5a to 5d.
...is a melting point glass. Agent Patent Attorney Uchihara ``Pame. @@@@@@@@@@@@@(C)
Claims (1)
ャップ部とを低融点ガラスにより封止する半導体装置用
パッケージにおいて、前記キャップ部あるいは前記ベー
ス部の一方またはこれらキャップ部とベース部の両方の
封止部分側の外周が面取りされたことを特徴とする半導
体装置用パッケージ。In a semiconductor device package in which a base portion on which a semiconductor element is mounted and a cap portion covering the base portion are sealed with low-melting glass, one of the cap portion, the base portion, or both the cap portion and the base portion may be sealed. A semiconductor device package characterized by having a chamfered outer periphery on the stop portion side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61105362A JPS62261157A (en) | 1986-05-07 | 1986-05-07 | Package for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61105362A JPS62261157A (en) | 1986-05-07 | 1986-05-07 | Package for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62261157A true JPS62261157A (en) | 1987-11-13 |
Family
ID=14405615
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61105362A Pending JPS62261157A (en) | 1986-05-07 | 1986-05-07 | Package for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62261157A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0614329A1 (en) * | 1993-03-05 | 1994-09-07 | Thomson-Csf | Method for hermically sealing an enclosure particularly with microelectronic circuits and enclosure thus obtained |
JP2000058692A (en) * | 1998-08-14 | 2000-02-25 | Toyo Commun Equip Co Ltd | Package for electronic components |
JP2022025834A (en) * | 2020-07-30 | 2022-02-10 | 日本特殊陶業株式会社 | Semiconductor package and semiconductor package manufacturing method |
-
1986
- 1986-05-07 JP JP61105362A patent/JPS62261157A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0614329A1 (en) * | 1993-03-05 | 1994-09-07 | Thomson-Csf | Method for hermically sealing an enclosure particularly with microelectronic circuits and enclosure thus obtained |
FR2702329A1 (en) * | 1993-03-05 | 1994-09-09 | Thomson Csf | A method of hermetically sealing an enclosure, in particular an enclosure containing microelectronic circuits, and an enclosure thus obtained. |
JP2000058692A (en) * | 1998-08-14 | 2000-02-25 | Toyo Commun Equip Co Ltd | Package for electronic components |
JP2022025834A (en) * | 2020-07-30 | 2022-02-10 | 日本特殊陶業株式会社 | Semiconductor package and semiconductor package manufacturing method |
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