JPS6226035U - - Google Patents

Info

Publication number
JPS6226035U
JPS6226035U JP11624085U JP11624085U JPS6226035U JP S6226035 U JPS6226035 U JP S6226035U JP 11624085 U JP11624085 U JP 11624085U JP 11624085 U JP11624085 U JP 11624085U JP S6226035 U JPS6226035 U JP S6226035U
Authority
JP
Japan
Prior art keywords
carrier
wafer
manipulator
movement range
stored
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11624085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11624085U priority Critical patent/JPS6226035U/ja
Publication of JPS6226035U publication Critical patent/JPS6226035U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11624085U 1985-07-29 1985-07-29 Pending JPS6226035U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11624085U JPS6226035U (US07709020-20100504-C00041.png) 1985-07-29 1985-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11624085U JPS6226035U (US07709020-20100504-C00041.png) 1985-07-29 1985-07-29

Publications (1)

Publication Number Publication Date
JPS6226035U true JPS6226035U (US07709020-20100504-C00041.png) 1987-02-17

Family

ID=31000643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11624085U Pending JPS6226035U (US07709020-20100504-C00041.png) 1985-07-29 1985-07-29

Country Status (1)

Country Link
JP (1) JPS6226035U (US07709020-20100504-C00041.png)

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