JPS62255809A - 膜厚測定装置 - Google Patents

膜厚測定装置

Info

Publication number
JPS62255809A
JPS62255809A JP10006986A JP10006986A JPS62255809A JP S62255809 A JPS62255809 A JP S62255809A JP 10006986 A JP10006986 A JP 10006986A JP 10006986 A JP10006986 A JP 10006986A JP S62255809 A JPS62255809 A JP S62255809A
Authority
JP
Japan
Prior art keywords
scanning
light beam
measured
film
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10006986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441925B2 (enrdf_load_html_response
Inventor
Toshishige Nagao
永尾　俊繁
Yoshiaki Ida
井田　芳明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10006986A priority Critical patent/JPS62255809A/ja
Publication of JPS62255809A publication Critical patent/JPS62255809A/ja
Publication of JPH0441925B2 publication Critical patent/JPH0441925B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP10006986A 1986-04-29 1986-04-29 膜厚測定装置 Granted JPS62255809A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10006986A JPS62255809A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10006986A JPS62255809A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS62255809A true JPS62255809A (ja) 1987-11-07
JPH0441925B2 JPH0441925B2 (enrdf_load_html_response) 1992-07-09

Family

ID=14264170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10006986A Granted JPS62255809A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS62255809A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0441925B2 (enrdf_load_html_response) 1992-07-09

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