JPS62247071A - Device for producing thin metallic film - Google Patents

Abstract

PURPOSE:To provide a titled device for production which can form a thin metallic film by vacuum deposition in a stable state without wrinkling by forming the peripheral face of a preheating roller to a porous face to apply uniform thermal changes to a substrate and to obviate the generation of wrinkling. CONSTITUTION:After the high-polymer material substrate 1 is run along the preheating roller 3, the substrate is run along the peripheral face of a heated cylindrical can 2. The thin metallic film is formed by a vacuum deposition method on the substrate 1 in the position of the can 2. The peripheral face of the roller 3 of the above-mentioned device is formed to the porous face so that the wrinkles are removed. A method by anodic oxidation or for forming another material different from the material of the roll 3 by a thermal spraying method, etc., on the roll surface to roughen the surface then polishing the surface is suitable for forming the above-mentioned surface. Since the wrinkling of the substrate 1 is obviated by the roller 3 in the above-mentioned constitution, the substrate travels in a wrinkle-free state on the cylindrical can 2 and the wrinkle-free thin metallic film is stably obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an apparatus for manufacturing a metal thin film, which forms a metal thin film on a polymer material substrate directly or via an underlayer.

(Prior Art) Conventional methods for forming metal thin films on substrates made of polymeric materials include plating and sputtering.

There are vacuum evaporation methods, etc. Particularly excellent is a continuous vacuum deposition method in which the substrate is deposited while running along the circumferential surface of a cylindrical can.

The conventional technique will be explained with reference to FIG. Figure 3 shows a schematic diagram of the internal structure of the continuous vacuum evaporation apparatus.
2 is a polymer material substrate, 2 is a cylindrical can, 3 is a preheating roller, 4 is a supply roll, 5 is a take-up roll, 6 is a free roller, and 7 is a metal evaporation source.

The substrate 1 made of a polymeric material runs along the preheating roller 3, and then runs along the circumferential surface of the heated cylindrical can 2 in the six directions of the arrows. The reason for raising the temperature of the cylindrical can 2 here is to improve the magnetic properties when the metal thin film to be formed is a magnetic thin film, and to improve the crystallinity etc. in the case of other metal thin films. . That is, in metal thin film type magnetic recording media and the like, generally, the higher the substrate temperature during vapor deposition, the higher the coercive force and the better the recording and reproducing characteristics.

In other metal thin films, generally, the higher the substrate temperature during vapor deposition, the higher the mobility of metal atoms on the substrate and the better the crystallinity. The preheating roller 3 is necessary to prevent wrinkles of the substrate. That is, without the preheating roller 3, when the substrate 1 at room temperature comes into contact with the heated cylindrical can 2, wrinkles would occur due to the sudden temperature change. After being heated, it is run along the heated cylindrical can 2, and a metal thin film is formed on the substrate 1 by the metal evaporation source 7.

(Problems to be Solved by the Invention) In the conventional continuous vacuum evaporation apparatus as shown in Fig. 3, the peripheral surface of the cylindrical can along which the substrate runs is finished with a mirror or super-mirror finish. Common.

In such a running system, if the rollers at the stage before the cylindrical can are simply heated to serve as preheated rollers, wrinkles will appear, so some kind of countermeasure is required.

The present invention provides a porous peripheral surface of the preheating roller to uniformly thermally deform the substrate, thereby preventing the generation of wrinkles, and making it possible to form a metal thin film in a stable state without wrinkles by vacuum evaporation. The purpose is to provide manufacturing equipment.

(Means for Solving the Problems) In order to solve the above problems, the metal thin film manufacturing apparatus of the present invention includes a cylindrical shape in which a polymeric material substrate is heated after running along a preheating roller. In an apparatus for forming a thin metal film on the substrate directly or through a base layer at the position of the cylindrical can by moving along the circumferential surface of the can, the preheating roller has a porous peripheral surface. It has a surface.

(Function) The polymer material substrate is preheated by the preheating roller and undergoes thermal deformation. If the peripheral surface of the preheating roller is porous, the thermal deformation is uniform and wrinkles do not occur. Since the polymer material substrate runs in a cylindrical can without wrinkles, a stable wrinkle-free metal thin film can be obtained thereon.

(Example) An embodiment of the present invention will be described with reference to FIGS. 1 and 2.

Figure 1 is a schematic cross-sectional view of the circumferential surface of the preheating roller.

Figure 2 is a schematic diagram of the internal structure of a continuous vacuum evaporation system in which the running path of the substrate is changed so that the surface of the polymer material substrate on which the metal thin film is formed is the back side.The differences from the conventional configuration shown in Figure 3 are: , only a free roller 9 is added between the cylindrical can 2 and the preheating roller 3, and the other constituent parts are the same and are given the same numbers.

In FIG. 1, 3 is a preheating roller, and 8 is a pore of a porous material formed on the circumferential surface of the preheating roller. The peripheral surface other than the 8 portions of the pores is finished by polishing to make it smooth. The reason why the circumferential surface of the preheating roller 3 is made porous to remove wrinkles is thought to be that the friction between the roller surface and the substrate is reduced by making it porous compared to a conventional preheating roller with a mirror or super mirror finish. It will be done.

As a result, the substrate 1 moves slightly on the preheating roller 3, but this progresses smoothly one after another, and finally the substrate 1 completes its deformation uniformly along the preheating roller 3. it is conceivable that.

There are various ways to make the surface porous, but any method may be used. Generally, rolls that can be heated are large and heavy, and the material of the roll is made by anodizing or by thermal spraying on the roll surface. A method of forming a different material roughly and polishing it afterwards is suitable for making it porous. Hard materials are basically the best materials to use in thermal spraying from the viewpoint of abrasiveness, such as AD, Oz*SiO,...
It is preferable to use MgO, CaO, or a mixture of at least two of them.The peripheral surface of the preheating roller 3 is preferably a conductor. That is, if the circumferential surface is an insulator, it will be charged by contact with the polymer material substrate 1, making running unstable. In such a case, it is preferable to cover the peripheral surface of the preheating roller 3 with a thin metal film to the extent that the porous function is not impaired.

Note that if scratches on the surface of the metal thin film due to contact between the preheating roller 3 and the metal thin film become a problem, it is possible to change the travel path of the substrate 1 as shown in FIG. At this time, the temperature of the free roller 9 needs to be about the same as that of the preheating roller 3 so that the substrate temperature does not drop.

Next, more specific embodiments of the present invention will be described.

The preheating roller 3 used was one whose circumferential surface was coated with AG, O, and the like by thermal spraying and then polished. When the surface condition at this time was examined using a step needle, it was found that the diameter was present at a pitch of 50 μm. The maximum depth was about 5 μm. Of course, there is no electrical conduction between the Aρ201 coated surface of the preheating roller 3 and the roller body.

Said AG20. A Ni film was formed on the coated surface using approximately 500 mermaid coats. As a result, the roller surface and the roller body were electrically connected. This preheating roller 3 is replaced with a third one showing a conventional configuration.
Vapor deposition was performed with the arrangement as shown in the figure. Film thickness 1 as substrate 1
A Ti film with a thickness of 100 μm was deposited on a 0 μm polyimide film.
A Co--Cr perpendicular magnetic anisotropy film with a thickness of 2000 nm was formed thereon as a metal thin film.

The temperature of the circumferential surface of the cylindrical can 2 was 240°C, and the temperature of the circumferential surface of the preheating roller 3 was 270°C. Moreover, between the cylindrical can 2 and the Co-Cr perpendicular magnetic anisotropy film, 1
A voltage of 20V was applied. The purpose of applying this voltage of 120 V is to ensure that the substrate 1 adheres to the cylindrical can 2 and to reduce thermal damage during the formation of the deposited film. Further, at this time, the preheating roller 3 was set at the same potential as the Co--Cr film to eliminate the influence of voltage application. This is particularly effective in a running system like the one shown in Figure 2. In this way, a thin film could be formed in a stable state without wrinkles.

Note that similar results were obtained when a Co--Cr film was formed via a Ni--Fe film with a thickness of 2000 mm instead of Ti on the substrate.

(Effects of the Invention) As described above, according to the metal thin film manufacturing apparatus of the present invention, the polymeric material substrate is preheated by the preheating roller, uniformly thermally deformed due to the low friction of the peripheral surface, and then elevated. Since it travels along a heated cylindrical can, a metal thin film can be stably formed without wrinkles by vacuum evaporation on the substrate at the position of the cylindrical can, either directly or via an underlayer.

[Brief explanation of drawings]

Fig. 1 is a schematic cross-sectional view of the circumferential surface of the preheating roller of the metal thin film manufacturing apparatus according to the present invention, and Fig. 2 is a metal thin film in which the running path of the substrate is changed so that the surface of the substrate on which the metal thin film is formed is the back side. FIG. 3 is a schematic diagram of the internal structure of a conventional metal thin film manufacturing device. 1... Polymer material substrate, 2... Cylindrical can, 3
... Preheating roller, 4... Supply roll, 5...
・Take-up roll, 6...free roller. 7... Metal evaporation source, 8... Pore, 9... Free roller. Patent applicant Matsushita Electric Industrial Co., Ltd. Fig. 1 3 ...Children 4 Maki or υ Lok 8 ...) Page 11 K Prayer Hen r Sign ly
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Claims (4)

[Claims] (1) A polymer material substrate is run along a preheating roller and then along the circumferential surface of a heated cylindrical can, and is placed directly on the substrate or on a base layer at the position of the cylindrical can. 1. An apparatus for forming a thin metal film using a vacuum evaporation method, characterized in that the circumferential surface of the preheating roller is porous. (2) When the porous material is an insulating material, the metal thin film according to claim (1), further comprising a preheating roller whose porous peripheral surface is coated with a metal thin film. manufacturing equipment. (3) The porous body on the circumferential surface of the preheating roller is Al_2
The apparatus for manufacturing a metal thin film according to claim 1, wherein the metal thin film is formed by thermal spraying using O_3, SiO_2, MgO, CaO, or a mixture of at least two thereof. (4) The metal thin film manufacturing apparatus according to claim (1), wherein the porous surface of the preheating roller is formed by anodizing the metal.