JPS6224403A - カンチレバ−の製造方法 - Google Patents

カンチレバ−の製造方法

Info

Publication number
JPS6224403A
JPS6224403A JP60163423A JP16342385A JPS6224403A JP S6224403 A JPS6224403 A JP S6224403A JP 60163423 A JP60163423 A JP 60163423A JP 16342385 A JP16342385 A JP 16342385A JP S6224403 A JPS6224403 A JP S6224403A
Authority
JP
Japan
Prior art keywords
base body
metallic base
boron film
cantilever
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60163423A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542041B2 (enExample
Inventor
Koichi Azuma
孝一 東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60163423A priority Critical patent/JPS6224403A/ja
Publication of JPS6224403A publication Critical patent/JPS6224403A/ja
Publication of JPH0542041B2 publication Critical patent/JPH0542041B2/ja
Granted legal-status Critical Current

Links

JP60163423A 1985-07-24 1985-07-24 カンチレバ−の製造方法 Granted JPS6224403A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60163423A JPS6224403A (ja) 1985-07-24 1985-07-24 カンチレバ−の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60163423A JPS6224403A (ja) 1985-07-24 1985-07-24 カンチレバ−の製造方法

Publications (2)

Publication Number Publication Date
JPS6224403A true JPS6224403A (ja) 1987-02-02
JPH0542041B2 JPH0542041B2 (enExample) 1993-06-25

Family

ID=15773617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60163423A Granted JPS6224403A (ja) 1985-07-24 1985-07-24 カンチレバ−の製造方法

Country Status (1)

Country Link
JP (1) JPS6224403A (enExample)

Also Published As

Publication number Publication date
JPH0542041B2 (enExample) 1993-06-25

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