JPS6224131Y2 - - Google Patents
Info
- Publication number
- JPS6224131Y2 JPS6224131Y2 JP8428181U JP8428181U JPS6224131Y2 JP S6224131 Y2 JPS6224131 Y2 JP S6224131Y2 JP 8428181 U JP8428181 U JP 8428181U JP 8428181 U JP8428181 U JP 8428181U JP S6224131 Y2 JPS6224131 Y2 JP S6224131Y2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- container
- moving block
- support device
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007789 sealing Methods 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8428181U JPS6224131Y2 (US20020051482A1-20020502-M00012.png) | 1981-06-10 | 1981-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8428181U JPS6224131Y2 (US20020051482A1-20020502-M00012.png) | 1981-06-10 | 1981-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57196854U JPS57196854U (US20020051482A1-20020502-M00012.png) | 1982-12-14 |
| JPS6224131Y2 true JPS6224131Y2 (US20020051482A1-20020502-M00012.png) | 1987-06-19 |
Family
ID=29879650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8428181U Expired JPS6224131Y2 (US20020051482A1-20020502-M00012.png) | 1981-06-10 | 1981-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6224131Y2 (US20020051482A1-20020502-M00012.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023166653A1 (ja) * | 2022-03-03 | 2023-09-07 | キヤノンアネルバ株式会社 | 真空処理装置 |
-
1981
- 1981-06-10 JP JP8428181U patent/JPS6224131Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57196854U (US20020051482A1-20020502-M00012.png) | 1982-12-14 |
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