JPS6223196A - Through hole plating method and automatic plating apparatus for printed wiring board - Google Patents

Through hole plating method and automatic plating apparatus for printed wiring board

Info

Publication number
JPS6223196A
JPS6223196A JP16246385A JP16246385A JPS6223196A JP S6223196 A JPS6223196 A JP S6223196A JP 16246385 A JP16246385 A JP 16246385A JP 16246385 A JP16246385 A JP 16246385A JP S6223196 A JPS6223196 A JP S6223196A
Authority
JP
Japan
Prior art keywords
plating
cathode
jig
printed wiring
minutes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16246385A
Other languages
Japanese (ja)
Other versions
JPH0318758B2 (en
Inventor
橋本 参蔵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MARUGO GIKEN KK
Original Assignee
MARUGO GIKEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MARUGO GIKEN KK filed Critical MARUGO GIKEN KK
Priority to JP16246385A priority Critical patent/JPS6223196A/en
Publication of JPS6223196A publication Critical patent/JPS6223196A/en
Publication of JPH0318758B2 publication Critical patent/JPH0318758B2/ja
Granted legal-status Critical Current

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  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 3−1 技術分野 本発明は、プリント配線基板(以下基板という)のスル
ホールめっき方法および自動めっき装置に関するもので
、特に詳しくは基板上のめっき膜の均一的な厚さを得る
ことと、連続的めっき処理による高品位なめっきを得る
ことを特徴とするものでおる。
[Detailed Description of the Invention] 3-1 Technical Field The present invention relates to a through-hole plating method and an automatic plating apparatus for printed wiring boards (hereinafter referred to as "boards"). It is characterized by obtaining high quality plating through continuous plating treatment.

3−2 従来技術 従来の基板のスルーホールめっき工程は大別すると、穴
あけされた基板の穴壁に導電性を付与する無電解めっき
工程と、導電性が付与された穴壁内の膜厚を増加させる
電気めっき工程とに分けることができる。
3-2 Prior Art The conventional through-hole plating process for substrates can be roughly divided into an electroless plating process that imparts conductivity to the hole wall of the drilled board, and an electroless plating process that imparts conductivity to the hole wall. It can be divided into increasing electroplating process.

%に後者の電気めっき工程では、基板1枚毎に通電でき
るように特別の治具(ラック・とも言う)が必要であシ
、通常は無電解めっき工程と電気めっき工程で別々の治
具を用いて処理するため、これらの工程間では治具を取
シ換える作業が必要であるため、−貫した全自動化方式
によるスルホールめっきは困難とされていた。
%, the latter electroplating process requires a special jig (also called a rack) to apply electricity to each board, and usually separate jigs are used for the electroless plating process and the electroplating process. Since it is necessary to change jigs between these processes, it has been difficult to perform through-hole plating in a completely automated manner.

更に、電気めっき処理の際、治具の形状や電気めっきの
装置、めっき液の福類によって電着された銅皮膜の厚さ
が、基板1枚中の異なった夫々の位置で差を生ずる、い
わゆる膜厚のバラツキを起こす欠点を有していた。
Furthermore, during electroplating, the thickness of the electrodeposited copper film varies depending on the shape of the jig, the electroplating equipment, and the quality of the plating solution, at different positions on a single substrate. It had the drawback of causing so-called variations in film thickness.

3−3 発明の開示 本出願人等は、これらのスルホールめっき処理を一括し
て行なう方法を鋭意研究していたところ、着脱可能な基
板挾持治具を用いることにより、無電解めっき工程と電
気めっき工程を簡易に行なえる方法と装置を見い出した
3-3 Disclosure of the Invention The applicants of the present invention have been conducting extensive research into a method of performing these through-hole plating processes all at once, and found that by using a removable substrate holding jig, the electroless plating process and the electroplating process can be combined. We have discovered a method and device that can simplify the process.

則ち、通常の無電解めっき工程は、ドリルで穴あけされ
た基板を ■ リン酸ナトリウム、トリポリリン酸ナトリウム、硼
酸ナトリウム、炭酸ナトリウムなどのアルカリビルダー
20〜50.9μ、非イオン系界面活性剤5〜101/
lを含む溶液に30〜60℃、2〜5分浸漬する(脱脂
という)。
In other words, in the normal electroless plating process, a substrate with holes drilled is heated with 20 to 50.9μ of an alkali builder such as sodium phosphate, sodium tripolyphosphate, sodium borate, or sodium carbonate, and 5 to 50.9μ of a nonionic surfactant. 101/
1 for 2 to 5 minutes at 30 to 60°C (referred to as degreasing).

■ 次イで、水洗いし、エチレンジアミンやトリエタノ
ールアミンなどの脂肪族アミン5〜1O,9μ、非イオ
ン系界面活性剤5〜101/lを含む溶液に20〜30
℃で、2〜5分浸漬しくコンデイシヨナーという)、水
洗する。
■ In the next step, wash with water and add 20 to 30% of the
℃, soak for 2 to 5 minutes (referred to as a conditioner), and rinse with water.

■ 次いで、過硫酸ナトリウム又は過硫酸アンモニウム
150〜200!?μ溶液に20〜30℃で1〜2 分
浸漬しくソフトエツチングという)、水洗する。
■ Next, sodium persulfate or ammonium persulfate 150-200! ? Dip in μ solution for 1 to 2 minutes at 20 to 30°C (referred to as soft etching) and wash with water.

■ 次に、濃硫酸10〜15%(容量)溶液に室温で1
〜2分処理し、ソフトエツチングで生じた表面の不溶解
物を溶解除去し、水洗する。
■ Next, add 10% to 15% (volume) solution of concentrated sulfuric acid at room temperature.
Treat for ~2 minutes to dissolve and remove undissolved matter on the surface generated by soft etching, and wash with water.

■ 次に、濃塩酸10〜30%(容it)液に室温で1
〜3分浸漬し、次いで塩化パラジウム0゜2〜0.61
/l、塩化第1錫20〜601/l、濃塩酸200〜3
00 m/7を含む溶液に10〜3O℃で3〜10分浸
漬し、無電解めっきが析出に必要な触媒を基板に付与す
る(キャタリストという)。
■ Next, add 10% to 30% (it volume) of concentrated hydrochloric acid at room temperature.
Soak for ~3 minutes, then palladium chloride 0°2~0.61
/l, stannous chloride 20-601/l, concentrated hydrochloric acid 200-3
00 m/7 for 3 to 10 minutes at 10 to 30° C. to provide the substrate with a catalyst necessary for electroless plating (referred to as a catalyst).

■ これを水洗して、硼弗化水素酸20〜50gμ溶液
に15〜35°Q、  5〜15分間処理しその後水洗
する。
(2) Wash this with water, treat it with a 20-50 gμ solution of borofluoric acid at 15-35°Q for 5-15 minutes, and then wash with water.

■ 次に、硫酸銅又は塩化鋼8〜i s i7t、ホル
ムアルデヒド7〜1s Vt、  ロッセル[30〜s
 o E/lを含有する液を水酸化ナトリウムでPH1
1,5〜12,5に調整した無電解銅めっき液に15〜
25°Cで15〜30分浸漬し、基板の全面に銅皮膜を
0.3〜0.9μm析出させる。
■ Next, copper sulfate or chloride steel 8~is i7t, formaldehyde 7~1s Vt, Rossel [30~s
o The solution containing E/l was adjusted to pH 1 with sodium hydroxide.
Electroless copper plating solution adjusted to 1.5 to 12.5 to 15 to
It is immersed at 25°C for 15 to 30 minutes to deposit a copper film of 0.3 to 0.9 μm over the entire surface of the substrate.

■ 次に、濃硫酸4〜10(容量)溶液に室温で1〜2
分間浸漬し、基板の表面を活性化させた後に水洗いする
■ Next, add 1 to 2 ml of concentrated sulfuric acid to 4 to 10 vol.
Dip for a minute to activate the surface of the substrate, then wash with water.

以上の8工程を経て、次の電気めっき工程に移るが、該
めっき工程は、通常ビロリン酸カリウム300〜350
’ E/l、  ビルリン酸銅65〜85 jj/l、
  28%アンモニア水2〜3rrL17tを含むピH
rリン酸銅めっき液に45〜60°Cで陰極電流密度1
5〜3.5 A/dm”で電気銅めっきを行う。
After the above 8 steps, we move on to the next electroplating step, which is usually performed using potassium birophosphate of 300 to 350%.
'E/l, Copper biruphosphate 65-85 jj/l,
PiH containing 17t of 28% ammonia water 2-3rrL
rCathode current density 1 in copper phosphate plating solution at 45-60°C
Electrolytic copper plating is performed at 5 to 3.5 A/dm''.

一般的には無電解めっき工程と電気めっき工程では、別
々の治具を用いて処理しており、従ってこの工程間で治
具を取シ換える作業が必要となってくるが、本発明では
無電解めっき時から2個のハンガ一部と着脱可能に取付
けたフレーム部と2個の横枠(巾を任意Kg整可能)と
からなる四角状の基板挾持治具(銅めっきを施した鉄製
フレーム)を用いるため、無電解めっきを終了すると次
工程の電気めっき装置内に基板を挾持したまま搬送し、
任意の膜厚に且つほぼ均一の膜厚を得ることができるも
のでおる。
Generally, separate jigs are used in the electroless plating process and the electroplating process, and therefore it is necessary to change the jigs between these processes, but this is not possible with the present invention. A rectangular board holding jig (copper-plated iron frame) consisting of two hanger parts, a removably attached frame part, and two horizontal frames (width can be adjusted to any kg) during electrolytic plating. ), after electroless plating is completed, the substrate is transported while being held in the electroplating equipment for the next process.
It is possible to obtain an arbitrary film thickness and a substantially uniform film thickness.

電気めっき装置内では、基板を挾持し九治具を陰極に接
続し、6整流器の陰極端子は陰極ブスバーに接続し全て
共通させる。
In the electroplating apparatus, the substrate is held and nine jigs are connected to the cathode, and the cathode terminals of the six rectifiers are connected to the cathode bus bar so that they are all common.

一方、整流器の陽極端子は個々に独立した陽極ブスバー
と接続させる。
On the other hand, the anode terminals of the rectifier are connected to individual anode busbars.

通電された治具は、ブツシャによりて移動しこの移行速
度は、1陽極間が1〜5分で8夛、この時間があまり長
くなることは、好ましくない。
The energized jig moves with a pusher, and the moving speed is 1 to 5 minutes, 8 times per anode, and it is not preferable that this time becomes too long.

めっき膜厚は、陰極電流密度と移行速度によってコント
ロールすることは可能である。
The plating film thickness can be controlled by the cathode current density and migration speed.

以下図面を参考に本発明方法及び自動めっき装置につい
て実施例を詳細に説明する。
Embodiments of the method and automatic plating apparatus of the present invention will be described in detail below with reference to the drawings.

実施例工 60crnX40crnの35μmのガラスエポキシプ
リント基板に約s、 o o oケの穴あけされ九基板
を、・・ンガ一部とフレーム部が着脱可能な治具で挾持
し、次の処理を行った。
Example work A 60 crn x 40 crn 35 μm glass epoxy printed circuit board with holes of approximately 2,000 mm in diameter was held in place by a jig with a removable part and a frame part, and the following processing was performed. .

0PC−250クリーナー中で50.9μ、50’Q、
4分間で処理し、水洗いし次。次に0PC−350コン
テイシツナー中で、20xl/125℃、4分浸漬し、
水洗後、過硫酸ナトリウム200.9μ、25C,2分
間浸漬し、水洗いした。
50.9μ, 50'Q, in 0PC-250 cleaner
Treat for 4 minutes, then wash with water. Next, immerse in 0PC-350 container at 20xl/125℃ for 4 minutes,
After washing with water, it was immersed in sodium persulfate 200.9μ, 25C for 2 minutes, and then washed with water.

次に、濃硫酸10%(容量)液に浸漬し、水洗い後、濃
塩酸50ゴ/l、0PC−8ALI701/を溶液に室
温で2分間処理した。
Next, it was immersed in a 10% (by volume) concentrated sulfuric acid solution, washed with water, and treated with a solution of concentrated hydrochloric acid 50g/l and 0PC-8ALI701/at room temperature for 2 minutes.

次に、0PC−80キヤクリストao*z/zOP C
−S A L 1701/l、濃塩酸30ゴ/lの溶液
に室温で8分間浸漬し、水洗いした。
Next, 0PC-80 Kiyakrist ao*z/zOP C
-S A L 1701/l, concentrated hydrochloric acid 30g/l solution for 8 minutes at room temperature, and washed with water.

次に0PC−5557クセレークー200TILl/を
液1c25”(1,8分浸漬した。水洗い後、0PC−
750無電解銅めっきA液100rd/1OPC−75
0無電解銅めっきB液100i1/lの混合液に20℃
で17分間浸漬し無電解めっきを施した。
Next, 0PC-5557 Kusereku 200TIL/ was immersed in 1c25" (1.8 minutes). After washing with water, 0PC-5557
750 Electroless copper plating A solution 100rd/1OPC-75
0 Electroless copper plating B solution 100i1/l mixed solution at 20℃
It was immersed in water for 17 minutes to perform electroless plating.

水洗後、基板を挾持し九治具をそのままで電気めっき装
置へ移動させ念。
After washing with water, hold the board and move the jig as it is to the electroplating equipment.

次いで、該治具を陰極に接続し、各整流器の陰極端子は
陰極ブスバーに接続し、全て共通させた。一方、整流器
の陽極端子は個々に独立した陽極ブスバーと接続させた
Next, the jig was connected to the cathode, and the cathode terminals of each rectifier were connected to the cathode busbar, making them all common. On the other hand, the anode terminals of the rectifier were connected to individual anode busbars.

めっき装置内は、ビロリン酸カリウム31511/l 
、 ピロリン酸鎖s 3E/l、  28%アンモニア
水3y/l、 ピルライト(商品名)2d/zのビpj
Jン酸銅めっき液で、陰極電流密度3.0A/drrX
で55分間電気めっきを施した。
Inside the plating equipment, potassium birophosphate 31511/l
, pyrophosphate chain s 3E/l, 28% ammonia water 3y/l, Pirurite (trade name) 2d/z bipj
Cathode current density 3.0A/drrX with J-acid copper plating solution
Electroplating was performed for 55 minutes.

又、通電され九治具は、ブツシャによって移動し、この
移動速度は、1陽極間が3分に調整した。
Furthermore, the nine jigs that were energized were moved by a push button, and the moving speed was adjusted to 3 minutes per anode.

めっき後、水洗乾燥し、電磁式の非破壊成膜測定器フィ
ッシャスコープを用いて、膜厚を測定した。その結果を
表−1に示す。なお膜厚側足部は基板左上部、右上部、
左下部、右下部、中央部の5ケ所を測定し、その厚さを
示すものとする。
After plating, the film was washed with water and dried, and the film thickness was measured using an electromagnetic non-destructive film-forming measuring device called Fischerscope. The results are shown in Table-1. Note that the film thickness side feet are the upper left, upper right, and
Measure at five locations: lower left, lower right, and center, and indicate the thickness.

実施例2 実施例1と全く同じ工程で処理し、陰極電流密度3.O
A/am’で110分間電気鋼めっきを施した。その膜
厚を表−2に示す。
Example 2 The same process as in Example 1 was carried out, and the cathode current density was 3. O
Electrical steel plating was performed at A/am' for 110 minutes. The film thickness is shown in Table-2.

比較例1 実施例1と同じ基板を用い、ステンレス鋼製基板挾持に
セットし、実施例1と同様な無電解銅めっきを施した。
Comparative Example 1 The same substrate as in Example 1 was used, set in a stainless steel substrate holder, and subjected to electroless copper plating in the same manner as in Example 1.

次に、ステンレス鋼製に樹脂コーティングされた通常の
電気の電気めっき用治具に基板を取付け、硫酸5%(容
jt)液に1分間浸漬し、水洗後、実施例1と同組成の
ビロリン酸銀めっき液を用いキャリア方式の通常のめっ
き装置を用いて陰極電流密度3.OA/dmで55分間
電気めっきを施し′た。
Next, the substrate was attached to an ordinary electroplating jig made of stainless steel coated with resin, and immersed in a 5% sulfuric acid solution (volume jt) for 1 minute. After washing with water, viroline having the same composition as in Example 1 was attached. Cathode current density 3. Using an ordinary carrier-type plating device using an acid silver plating solution. Electroplating was performed at OA/dm for 55 minutes.

めっき後、水洗し乾燥後、実施例1と同様な膜厚測定器
で膜厚を測定した。その結果を表−1に示す。
After plating, washing with water and drying, the film thickness was measured using the same film thickness measuring device as in Example 1. The results are shown in Table-1.

比較例2 比較例1と同一条件で行い、陰極電流密度3゜OAla
mで110分間電気めっきを施した。
Comparative Example 2 Conducted under the same conditions as Comparative Example 1, cathode current density 3°OAla
Electroplating was performed for 110 minutes at m.

結果を表−1に示す。The results are shown in Table-1.

表−1めりき膜厚 瞳) 発明の効果 本発明は無電解めっき工程と電気めっき工程に共通の基
板挾持治具を用いることによシ連続的に基板のスルホー
ルめっきを行なうことができるものである。
Effects of the Invention The present invention enables continuous through-hole plating of substrates by using a common substrate holding jig for electroless plating and electroplating processes. be.

そして、膜厚も均一な為、製造工程、特に不要部分の銅
を溶解させる(エツチングという)作業がスムースに行
なえる利点を、有する。
Further, since the film thickness is uniform, it has the advantage that the manufacturing process, especially the work of dissolving (etching) unnecessary portions of copper, can be carried out smoothly.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明自動めっき装置の平面図、第2図は断
面図である。 符号の説明 1、 陰極ブスバー      λ 陽極ブスバー3、
整流器     4.めっき液 5、治具搬送器(ブツシャ)6.絶縁体7、めっき槽 
     8.陽  極第2図
FIG. 1 is a plan view of the automatic plating apparatus of the present invention, and FIG. 2 is a sectional view. Explanation of symbols 1, Cathode busbar λ Anode busbar 3,
Rectifier 4. Plating solution 5, jig carrier (butsusha) 6. Insulator 7, plating bath
8. Anode Figure 2

Claims (2)

【特許請求の範囲】[Claims] (1)被めっきプリント配線基板を可動型鉄製基板挾持
治具を用いて、通常の無電解銅めっき法によって穴壁内
に電導性を付与し、次いで基板を挾持した治具を陰極側
に接続すると共に、各整流器の陰極端子は陰極ブスバー
に接続して全て共通させ、一方、整流器の陽極端子は個
々に独立した陽極ブスバーと接続させると共に通電され
た基板挾持治具をプッシャーで移動させながら連続めっ
きすることを特徴とするプリント配線基板のスルホール
めっき方法。
(1) Use a movable iron board holding jig to give the printed wiring board to be plated electrical conductivity in the hole wall using the normal electroless copper plating method, and then connect the jig holding the board to the cathode side. At the same time, the cathode terminals of each rectifier are connected to a cathode busbar so that they are all common, while the anode terminals of the rectifiers are individually connected to independent anode busbars, and the energized board holding jig is moved continuously using a pusher. A through-hole plating method for printed wiring boards characterized by plating.
(2)めっき槽の片面に整流器を並列させると共に、め
っき槽の両面に個々に独立した陽極ブスバーを設けて陽
極端子と接続させ、その中央部に一本の陰極ブスバーを
通し、基板を挾持した治具を陰極に接続させ、各整流器
の陰極端子は陰極ブスバーに接続すると共に、該治具を
プッシャーによって移動せしめることによって、めっき
を連続的に行なうプリント配線基板の自動めっき装置。
(2) A rectifier was arranged in parallel on one side of the plating tank, and independent anode busbars were installed on both sides of the plating tank and connected to the anode terminal, and a single cathode busbar was passed through the center to sandwich the substrate. An automatic plating device for printed wiring boards, in which a jig is connected to a cathode, the cathode terminal of each rectifier is connected to a cathode busbar, and the jig is moved by a pusher to perform plating continuously.
JP16246385A 1985-07-23 1985-07-23 Through hole plating method and automatic plating apparatus for printed wiring board Granted JPS6223196A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16246385A JPS6223196A (en) 1985-07-23 1985-07-23 Through hole plating method and automatic plating apparatus for printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16246385A JPS6223196A (en) 1985-07-23 1985-07-23 Through hole plating method and automatic plating apparatus for printed wiring board

Publications (2)

Publication Number Publication Date
JPS6223196A true JPS6223196A (en) 1987-01-31
JPH0318758B2 JPH0318758B2 (en) 1991-03-13

Family

ID=15755094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16246385A Granted JPS6223196A (en) 1985-07-23 1985-07-23 Through hole plating method and automatic plating apparatus for printed wiring board

Country Status (1)

Country Link
JP (1) JPS6223196A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009145539A (en) * 2007-12-13 2009-07-02 Shin Etsu Chem Co Ltd Photomask and exposure method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586998A (en) * 1981-06-25 1983-01-14 ナプコ・インコ−ポレ−テツド High speed plating apparatus of flat processed article
JPS5874095A (en) * 1981-09-30 1983-05-04 田中貴金属工業株式会社 Method of plating printed board
JPS59153899A (en) * 1983-02-19 1984-09-01 Mitsui Toatsu Chem Inc Electroplating apparatus for printed substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586998A (en) * 1981-06-25 1983-01-14 ナプコ・インコ−ポレ−テツド High speed plating apparatus of flat processed article
JPS5874095A (en) * 1981-09-30 1983-05-04 田中貴金属工業株式会社 Method of plating printed board
JPS59153899A (en) * 1983-02-19 1984-09-01 Mitsui Toatsu Chem Inc Electroplating apparatus for printed substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009145539A (en) * 2007-12-13 2009-07-02 Shin Etsu Chem Co Ltd Photomask and exposure method

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