JPS6222538B2 - - Google Patents

Info

Publication number
JPS6222538B2
JPS6222538B2 JP56023069A JP2306981A JPS6222538B2 JP S6222538 B2 JPS6222538 B2 JP S6222538B2 JP 56023069 A JP56023069 A JP 56023069A JP 2306981 A JP2306981 A JP 2306981A JP S6222538 B2 JPS6222538 B2 JP S6222538B2
Authority
JP
Japan
Prior art keywords
thin
thick part
metal wiring
thick
central
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56023069A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57138183A (en
Inventor
Michitaka Shimazoe
Yoshitaka Matsuoka
Yukio Takahashi
Masanori Tanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56023069A priority Critical patent/JPS57138183A/ja
Publication of JPS57138183A publication Critical patent/JPS57138183A/ja
Publication of JPS6222538B2 publication Critical patent/JPS6222538B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP56023069A 1981-02-20 1981-02-20 Semiconductor pressure and differential pressure detector Granted JPS57138183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56023069A JPS57138183A (en) 1981-02-20 1981-02-20 Semiconductor pressure and differential pressure detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56023069A JPS57138183A (en) 1981-02-20 1981-02-20 Semiconductor pressure and differential pressure detector

Publications (2)

Publication Number Publication Date
JPS57138183A JPS57138183A (en) 1982-08-26
JPS6222538B2 true JPS6222538B2 (cs) 1987-05-19

Family

ID=12100108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56023069A Granted JPS57138183A (en) 1981-02-20 1981-02-20 Semiconductor pressure and differential pressure detector

Country Status (1)

Country Link
JP (1) JPS57138183A (cs)

Also Published As

Publication number Publication date
JPS57138183A (en) 1982-08-26

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