JPS6222530B2 - - Google Patents

Info

Publication number
JPS6222530B2
JPS6222530B2 JP58168139A JP16813983A JPS6222530B2 JP S6222530 B2 JPS6222530 B2 JP S6222530B2 JP 58168139 A JP58168139 A JP 58168139A JP 16813983 A JP16813983 A JP 16813983A JP S6222530 B2 JPS6222530 B2 JP S6222530B2
Authority
JP
Japan
Prior art keywords
integrated circuit
pattern
circuit pattern
reflected
defect inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58168139A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5972147A (ja
Inventor
Shinobu Hase
Tadashi Suda
Katsumi Takami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58168139A priority Critical patent/JPS5972147A/ja
Publication of JPS5972147A publication Critical patent/JPS5972147A/ja
Publication of JPS6222530B2 publication Critical patent/JPS6222530B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58168139A 1983-09-14 1983-09-14 集積回路パタ−ンの欠陥検査装置 Granted JPS5972147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58168139A JPS5972147A (ja) 1983-09-14 1983-09-14 集積回路パタ−ンの欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58168139A JPS5972147A (ja) 1983-09-14 1983-09-14 集積回路パタ−ンの欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5972147A JPS5972147A (ja) 1984-04-24
JPS6222530B2 true JPS6222530B2 (OSRAM) 1987-05-19

Family

ID=15862556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58168139A Granted JPS5972147A (ja) 1983-09-14 1983-09-14 集積回路パタ−ンの欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5972147A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140151U (OSRAM) * 1988-03-22 1989-09-26

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008216054A (ja) * 2007-03-05 2008-09-18 Hitachi High-Technologies Corp 被検査物の検査装置及び被検査物の検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140151U (OSRAM) * 1988-03-22 1989-09-26

Also Published As

Publication number Publication date
JPS5972147A (ja) 1984-04-24

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