JPS6222467B2 - - Google Patents

Info

Publication number
JPS6222467B2
JPS6222467B2 JP53104777A JP10477778A JPS6222467B2 JP S6222467 B2 JPS6222467 B2 JP S6222467B2 JP 53104777 A JP53104777 A JP 53104777A JP 10477778 A JP10477778 A JP 10477778A JP S6222467 B2 JPS6222467 B2 JP S6222467B2
Authority
JP
Japan
Prior art keywords
diaphragm
pressure
support
conversion element
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53104777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5533025A (en
Inventor
Shoichi Kakimoto
Josuke Nakada
Tooru Kameda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10477778A priority Critical patent/JPS5533025A/ja
Publication of JPS5533025A publication Critical patent/JPS5533025A/ja
Publication of JPS6222467B2 publication Critical patent/JPS6222467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP10477778A 1978-08-28 1978-08-28 Pressure-to-electricity converter Granted JPS5533025A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10477778A JPS5533025A (en) 1978-08-28 1978-08-28 Pressure-to-electricity converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10477778A JPS5533025A (en) 1978-08-28 1978-08-28 Pressure-to-electricity converter

Publications (2)

Publication Number Publication Date
JPS5533025A JPS5533025A (en) 1980-03-08
JPS6222467B2 true JPS6222467B2 (enrdf_load_html_response) 1987-05-18

Family

ID=14389900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10477778A Granted JPS5533025A (en) 1978-08-28 1978-08-28 Pressure-to-electricity converter

Country Status (1)

Country Link
JP (1) JPS5533025A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2832894B2 (ja) * 1988-07-26 1998-12-09 日立建機株式会社 圧力センサ及びその製造方法、並びに圧力センサを備える油圧機器
EP2185904A2 (en) * 2007-08-27 2010-05-19 Koninklijke Philips Electronics N.V. Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe

Also Published As

Publication number Publication date
JPS5533025A (en) 1980-03-08

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