JPS622242U - - Google Patents
Info
- Publication number
- JPS622242U JPS622242U JP9360985U JP9360985U JPS622242U JP S622242 U JPS622242 U JP S622242U JP 9360985 U JP9360985 U JP 9360985U JP 9360985 U JP9360985 U JP 9360985U JP S622242 U JPS622242 U JP S622242U
- Authority
- JP
- Japan
- Prior art keywords
- substrate support
- fixing base
- parallel
- semiconductor
- fitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9360985U JPS622242U (cs) | 1985-06-20 | 1985-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9360985U JPS622242U (cs) | 1985-06-20 | 1985-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS622242U true JPS622242U (cs) | 1987-01-08 |
Family
ID=30651443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9360985U Pending JPS622242U (cs) | 1985-06-20 | 1985-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS622242U (cs) |
-
1985
- 1985-06-20 JP JP9360985U patent/JPS622242U/ja active Pending