JPH01108926U - - Google Patents
Info
- Publication number
- JPH01108926U JPH01108926U JP256588U JP256588U JPH01108926U JP H01108926 U JPH01108926 U JP H01108926U JP 256588 U JP256588 U JP 256588U JP 256588 U JP256588 U JP 256588U JP H01108926 U JPH01108926 U JP H01108926U
- Authority
- JP
- Japan
- Prior art keywords
- support
- end plates
- wafer
- jig
- support shafts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP256588U JPH01108926U (cs) | 1988-01-14 | 1988-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP256588U JPH01108926U (cs) | 1988-01-14 | 1988-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01108926U true JPH01108926U (cs) | 1989-07-24 |
Family
ID=31203439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP256588U Pending JPH01108926U (cs) | 1988-01-14 | 1988-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01108926U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213022A (ja) * | 1984-04-09 | 1985-10-25 | Tekunisuko:Kk | 縦型支持具 |
-
1988
- 1988-01-14 JP JP256588U patent/JPH01108926U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213022A (ja) * | 1984-04-09 | 1985-10-25 | Tekunisuko:Kk | 縦型支持具 |