JPH01154628U - - Google Patents
Info
- Publication number
- JPH01154628U JPH01154628U JP5066488U JP5066488U JPH01154628U JP H01154628 U JPH01154628 U JP H01154628U JP 5066488 U JP5066488 U JP 5066488U JP 5066488 U JP5066488 U JP 5066488U JP H01154628 U JPH01154628 U JP H01154628U
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- frame
- protrusion
- support
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5066488U JPH01154628U (cs) | 1988-04-15 | 1988-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5066488U JPH01154628U (cs) | 1988-04-15 | 1988-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01154628U true JPH01154628U (cs) | 1989-10-24 |
Family
ID=31276703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5066488U Pending JPH01154628U (cs) | 1988-04-15 | 1988-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01154628U (cs) |
-
1988
- 1988-04-15 JP JP5066488U patent/JPH01154628U/ja active Pending