JPS62222415A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPS62222415A
JPS62222415A JP6405986A JP6405986A JPS62222415A JP S62222415 A JPS62222415 A JP S62222415A JP 6405986 A JP6405986 A JP 6405986A JP 6405986 A JP6405986 A JP 6405986A JP S62222415 A JPS62222415 A JP S62222415A
Authority
JP
Japan
Prior art keywords
coil
conductor
pattern width
turns
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6405986A
Other languages
Japanese (ja)
Inventor
Kazuo Shiiki
椎木 一夫
Isamu Yuhito
勇 由比藤
Hidetoshi Moriwaki
森脇 英稔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6405986A priority Critical patent/JPS62222415A/en
Publication of JPS62222415A publication Critical patent/JPS62222415A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details

Abstract

PURPOSE:To lower a coil resistance, and to reduce a head noise, by constituting a device so that the conductor pattern width at the rearward part of a spiral coil is reduced toward the inside direction, and the same widths are not provided over all of the turns. CONSTITUTION:On a substrate 10, an upper and a lower magnetic poles 11 and 15, a gap layer 12, a coil 13 and an insulator 14 are formed, and coil conductor pattern widths L at the C part of the rearward part are set as L1=12mu for three turns of the inside, L2=16mu for the next two turns, L3=20mu for the next two turns, and L4=24mu for one turn of an outside, and the pattern width of a B part in a magnetic path is set as a constant 6mu. Thus, since the pattern width at the rearward part is reduced toward the inside, and the coil resistance is reduced, the head noise can be reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、薄膜磁気ヘッドに係り、とくに高密度記録に
好適で雑音が低く、出方の大きな薄膜磁気ヘッドに関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a thin film magnetic head, and particularly to a thin film magnetic head that is suitable for high density recording, has low noise, and has a large projection.

〔従来の技術〕[Conventional technology]

従来の薄膜ヘッドは特開昭55−84020号公報に示
されるように通常スパイラル状のコイルを有し、コイル
導体のパターン幅が、磁路内、側部、後部で各々異なっ
ているが、各ターンごとの同一部のパターン幅は同じに
なっている。すなわち、第2図の磁路内のA−A’断面
を示す第3図をみれば明らかなように、磁路中B部及び
後部C部においてターンによらず導体は各々同じパター
ン幅L1゜L2を有していることがわかる。側部り部に
ついても同様である。また、別の例は、特開昭55−6
2523号公報に示されているが、磁路内の導体のパタ
ーン幅が記録媒体対向面Aより遠い距離に位置する導体
の断面積を近い距離に位置する導体の断面積よりも大き
くする薄膜磁気ヘッドが開示されている。すなわち、磁
路内において、コイルの内側に向かってパターン幅が小
さくなっている例が示されている。これは、駆動電流と
発生磁界の関係から、より小さな記録電流で有効にヘッ
ド磁界を発生させるための方法として示されている。
Conventional thin film heads usually have a spiral coil as shown in Japanese Patent Application Laid-Open No. 55-84020, and the pattern width of the coil conductor is different in the magnetic path, on the sides, and at the rear. The pattern width of the same part in each turn is the same. That is, as is clear from FIG. 3 showing the AA' cross section in the magnetic path in FIG. 2, the conductors have the same pattern width L1° in the B section and the rear C section of the magnetic path, regardless of the turn. It can be seen that it has L2. The same applies to the side edges. Another example is JP-A-55-6
As shown in Japanese Patent No. 2523, there is a thin film magnetism in which the pattern width of the conductor in the magnetic path is such that the cross-sectional area of the conductor located at a distance from the recording medium facing surface A is larger than the cross-sectional area of the conductor located at a closer distance. The head is exposed. That is, an example is shown in which the pattern width decreases toward the inside of the coil in the magnetic path. This has been shown as a method for effectively generating a head magnetic field with a smaller recording current in view of the relationship between the drive current and the generated magnetic field.

しかし、コイル抵抗の点からは十分な検討がなされてい
なかった。
However, sufficient consideration has not been made from the viewpoint of coil resistance.

薄膜磁気ヘッドは、使用目的にもよるが、コイル導体の
電流密度は通常〜5X105A/ad程度以下で導体の
許容電流密度に対して十分余裕がある状態で使われる。
Thin film magnetic heads are used with the current density of the coil conductor usually being about 5.times.10.sup.5 A/ad or less, which is sufficient for the permissible current density of the conductor, although it depends on the purpose of use.

これに対して、高記録密度化の要求からヘッド雑音の低
減、すなわちヘッドのコイル抵抗の低減が急務となって
いるので、使用される電流密度を低下させるよりはコイ
ル抵抗を小さくする方が一般的に望ましいと考えられる
On the other hand, due to the demand for higher recording densities, there is an urgent need to reduce head noise, that is, to reduce the coil resistance of the head, so it is generally better to reduce the coil resistance than to reduce the current density used. considered desirable.

コイル導体が形成可能な面積は、ヘッドの浮上特性上の
要求から制限されるので、薄膜磁気ヘッドのコイル導体
としては限られた面積内にできるだけ抵抗が小さくなる
ように形成される必要がある。
The area in which a coil conductor can be formed is limited by the requirements for the flying characteristics of the head, so the coil conductor of a thin film magnetic head must be formed within a limited area so as to have as little resistance as possible.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上述したように、従来技術はコイル抵抗の点については
配慮がされておらず、ヘッド雑音が大きいという問題が
あった。本発明の目的は、コイル抵抗を低下させ、ヘッ
ド雑音を低減することにある。(問題点を解決するため
の手段〕 上記目的は、導体コイル後部のパターン幅をコイルの内
側に向って、すなわち上下両磁極2と2′との後部コン
タクト部(第2,3図のE部)に向かって小さくするこ
とによって、達成される。
As described above, the conventional technology does not take coil resistance into consideration, and has the problem of large head noise. An object of the present invention is to lower coil resistance and reduce head noise. (Means for Solving the Problem) The above object is to change the pattern width at the rear of the conductor coil toward the inside of the coil, that is, at the rear contact portion of both the upper and lower magnetic poles 2 and 2' (section E in Figs. 2 and 3). ).

さらに、具体的には、コイル後部のパターンをいくつか
にわけてパターン幅がLl[μm〕の導体を、n1ター
ンずつ巻線する。このとき、パターン幅は必ずコイルの
内側から外にむかって大きくなっており、nlはn t
 L i< 40を満たす範囲で巻線され、Σn s 
= N (N :全巻線数)であるようにすれば、上記
目的が達成される。
More specifically, the pattern at the rear of the coil is divided into several parts, and a conductor having a pattern width of Ll [μm] is wound in n1 turns each. At this time, the pattern width always increases from the inside of the coil to the outside, and nl is n t
The wire is wound in a range that satisfies L i < 40, and Σn s
= N (N: total number of windings), the above objective can be achieved.

〔作用〕[Effect]

コイル導体の抵抗は、導体断面積が小さな部分の長さを
短く、導体断面積が大きな部分の長さを長くすれば、小
さくできる。しかし、単にパターン幅を大きくすると、
コイル外周部の一周の長さが長くなるので、必ずしも抵
抗は小さくならない。
The resistance of the coil conductor can be reduced by shortening the length of the portion where the conductor has a small cross-sectional area and increasing the length of the portion where the conductor has a large cross-sectional area. However, if you simply increase the pattern width,
Since the length of one circumference of the outer periphery of the coil becomes longer, the resistance does not necessarily become smaller.

逆にコイル外縁を小さくして、−周の長さを小さくしよ
うとするとパターン幅を小さくせざるを得ず、断面積が
小さくなってかえって抵抗が大きくなる場合がある。コ
イルの内側の一周の長さが短くなるように、内側のパタ
ーン幅は小さくシ、外側の一周の長さが長くなる部分の
、パターン幅は大きくしてやることによって、コイル抵
抗全体を下げることができる。
On the other hand, if an attempt is made to reduce the circumferential length by reducing the outer edge of the coil, the pattern width must be reduced, which may result in a smaller cross-sectional area and an increase in resistance. The overall coil resistance can be lowered by making the inner pattern width smaller so that the length of the inner circumference of the coil becomes shorter, and increasing the pattern width of the outer part where the length of the outer circumference becomes longer. .

また、記録再生効率の点から磁路はできるだけ短くした
いので、磁路中に形成されるコイルのパターン幅は電流
密度が許される範囲で小さくすることが望ましい、コイ
ルパターンの横幅は浮上特性との関係である程度以上大
きくできない。したがって、コイル後部のパターン幅を
調整することによって抵抗を低下させることが望ましい
Also, from the point of view of recording and reproducing efficiency, it is desirable to keep the magnetic path as short as possible, so it is desirable to make the pattern width of the coil formed in the magnetic path as small as the current density allows.The width of the coil pattern is determined by the levitation characteristics. Relationships cannot grow beyond a certain point. Therefore, it is desirable to reduce the resistance by adjusting the pattern width at the rear of the coil.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図により説明する。 An embodiment of the present invention will be described below with reference to FIG.

第1図は1本発明の薄膜ヘッドの断面図、(第2図のA
−A’断面に対応する断面を示す図)である。基板10
の上に下部磁極11.ギャップ層12、コイル13.絶
縁物14.上部磁極15が形成されている。後部(C部
分)コイル導体のパターン幅りは内側のn1=3タ一ン
分がLx =12μm、次のn2=2タ一ン分がLz=
16μm、次のn3=2タ一ン分がLa=20pm、一
番外側のn4=1タ一ン分がL+=:24μmで計nt
+nt+na+n4=8ターンの巻線がしである。
FIG. 1 is a sectional view of a thin film head of the present invention (A in FIG. 2).
-A' is a diagram showing a cross section corresponding to the cross section). Substrate 10
on top of the lower magnetic pole 11. Gap layer 12, coil 13. Insulator 14. An upper magnetic pole 15 is formed. The pattern width of the rear (C part) coil conductor is Lx = 12 μm for the inner n1 = 3 tangs, and Lz = 12 μm for the next n2 = 2 tangs.
16 μm, the next n3 = 2 tans is La = 20 pm, the outermost n4 = 1 tan is L + =: 24 μm, total nt.
+nt+na+n4=8 turns of winding.

なお、パターン間の間隔はどこも約4μmである。Note that the spacing between patterns is approximately 4 μm everywhere.

後部以外の部分、磁路内(B部分)のパターン幅はター
ン毎に6μm一定、パターン間隔は3μm一定、側部(
第2図のD部分に相当する部分)のパターン幅はターン
毎に10μm一定、パターン間隔は4μmはターンによ
らず一定としである。
The pattern width in the magnetic path (part B) other than the rear part is constant at 6 μm for each turn, the pattern interval is constant at 3 μm, and the side part (
The pattern width of the portion (corresponding to portion D in FIG. 2) is constant at 10 μm for each turn, and the pattern interval is constant at 4 μm regardless of the turn.

導体高さは2μm、導体材料は銅である。導体パターン
の形成は膜形成をスパッタ法、エツチングをイオンミリ
ング法で行い、導体のテーパ角は約60’であった。
The conductor height is 2 μm, and the conductor material is copper. The conductor pattern was formed by sputtering and etching by ion milling, and the taper angle of the conductor was approximately 60'.

このコイル導体の直流抵抗は4.3Ωであった。The DC resistance of this coil conductor was 4.3Ω.

同様にして、後部のコイルパターン幅を12μm一定と
して試作したヘッドのコイル抵抗は6.2Ω。
Similarly, the coil resistance of a prototype head made with the rear coil pattern width constant at 12 μm was 6.2Ω.

24μm一定として試作したヘッドのコイル抵抗は5.
9Ω と、いずれの場合も本発明の場合よりも高い抵抗
値しか得られなかった。
The coil resistance of the prototype head with a constant 24 μm was 5.
In both cases, only a resistance value of 9Ω, higher than that of the present invention, was obtained.

本実施例に示したようにコイル後部の導体パターン幅を
内側に向かって小さくなるようにコイル導体を楕成すれ
ば、抵抗の低いコイルを得ることができる0種々のパタ
ーン幅とターン数の組み合せについて、ヘッドを試作し
た結果、コイル後部のパターン幅L1(μm〕を有する
導体をn1ターンずつ巻き、この際、ntLt(40を
満たすように巻線し、総巻線数N=Σn1となるように
すれば、抵抗値を効率的に低減できることがわかった。
As shown in this example, if the coil conductor is formed into an ellipse so that the conductor pattern width at the rear of the coil becomes smaller toward the inside, a coil with low resistance can be obtained.Various combinations of pattern width and number of turns As a result of making a prototype head, we found that a conductor having a pattern width L1 (μm) at the rear of the coil was wound every n1 turn, and at this time, the wire was wound so that ntLt (40) was satisfied, and the total number of turns N = Σn1. It was found that the resistance value can be effectively reduced by doing so.

〔発明の効果〕〔Effect of the invention〕

本発明にれば、低抵抗のコイル導体が得られるので、低
雑音化の効果がある。
According to the present invention, since a coil conductor with low resistance can be obtained, there is an effect of reducing noise.

また、実施例には、コイル導体がスパイラル状に一層形
成されている場合を述べたが、2層以上に形成されてい
る場合も本発明が適用できることはもちろんである。多
層コイルの場合は各層について本発明を満たせばよい。
Further, in the embodiments, a case has been described in which the coil conductor is formed in one layer in a spiral shape, but it goes without saying that the present invention is also applicable to a case in which the coil conductor is formed in two or more layers. In the case of a multilayer coil, the present invention may be satisfied for each layer.

また、場合によっては、磁路内、側部のコイル導体のパ
ターン幅を変えてコイル導体が形成されることも考えら
れるが、コイ抵抗減少に関してはコイル後部の導体パタ
ーン幅を調整することが一番望ましいので、これらの組
み合せについても本発明が適用できることは当然である
In some cases, the coil conductor may be formed by changing the pattern width of the coil conductor inside the magnetic path or on the side, but in order to reduce the coil resistance, it is best to adjust the width of the conductor pattern at the rear of the coil. Therefore, it is natural that the present invention can be applied to combinations of these.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の薄膜ヘッドを示す断面図、
第2図は一般的な薄膜ヘッドの平面図。 第3図はそのA−A’断面図である。 1・・・導体コイル、2,2′・・・磁極、3・・・引
き出し線、10・・・基板、11・・・下部磁極、12
・・・ギャップ層、13・・・導体コイル、14・・・
絶縁物、15・・・幕 f 口 第 2 口 !・・・導体コイル 2・・−礒債 3・・・g1各出し廼に
FIG. 1 is a sectional view showing a thin film head according to an embodiment of the present invention;
FIG. 2 is a plan view of a general thin film head. FIG. 3 is a sectional view taken along the line AA'. DESCRIPTION OF SYMBOLS 1... Conductor coil, 2, 2'... Magnetic pole, 3... Lead wire, 10... Board, 11... Lower magnetic pole, 12
...Gap layer, 13...Conductor coil, 14...
Insulator, 15... Act f mouth 2nd mouth! ...Conductor coil 2... - Bond 3...G1 each outlet

Claims (1)

【特許請求の範囲】[Claims] 1、スパイラル状コイル後部の導体パターン幅はターン
毎に内側から外側に向かって、同一かあるいは大きくな
っており、全ターンにわたっては同一ではないことを特
徴とする薄膜磁気ヘッド。
1. A thin film magnetic head characterized in that the width of the conductor pattern at the rear of the spiral coil is the same or increases from the inside to the outside for each turn, and is not the same over all turns.
JP6405986A 1986-03-24 1986-03-24 Thin film magnetic head Pending JPS62222415A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6405986A JPS62222415A (en) 1986-03-24 1986-03-24 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6405986A JPS62222415A (en) 1986-03-24 1986-03-24 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS62222415A true JPS62222415A (en) 1987-09-30

Family

ID=13247138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6405986A Pending JPS62222415A (en) 1986-03-24 1986-03-24 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS62222415A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0757217A (en) * 1993-08-10 1995-03-03 Fuji Elelctrochem Co Ltd Thin-film magnetic head
US6795271B2 (en) 2000-01-05 2004-09-21 Nec Corporation Recording head, recording head manufacturing method, combined head and magnetic recording/reproduction apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0757217A (en) * 1993-08-10 1995-03-03 Fuji Elelctrochem Co Ltd Thin-film magnetic head
US6795271B2 (en) 2000-01-05 2004-09-21 Nec Corporation Recording head, recording head manufacturing method, combined head and magnetic recording/reproduction apparatus
US7173793B2 (en) 2000-01-05 2007-02-06 Nec Corporation Recording head, recording head manufacturing method, combined head and magnetic recording/reproduction apparatus

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