JPS6222154B2 - - Google Patents
Info
- Publication number
- JPS6222154B2 JPS6222154B2 JP56198855A JP19885581A JPS6222154B2 JP S6222154 B2 JPS6222154 B2 JP S6222154B2 JP 56198855 A JP56198855 A JP 56198855A JP 19885581 A JP19885581 A JP 19885581A JP S6222154 B2 JPS6222154 B2 JP S6222154B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- forming
- substrate
- insulating film
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004973 liquid crystal related substance Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 239000012780 transparent material Substances 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 241001085205 Prenanthella exigua Species 0.000 description 1
- 229910001361 White metal Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010969 white metal Substances 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56198855A JPS58100174A (ja) | 1981-12-10 | 1981-12-10 | 液晶表示装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56198855A JPS58100174A (ja) | 1981-12-10 | 1981-12-10 | 液晶表示装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58100174A JPS58100174A (ja) | 1983-06-14 |
| JPS6222154B2 true JPS6222154B2 (US06815460-20041109-C00097.png) | 1987-05-15 |
Family
ID=16398023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56198855A Granted JPS58100174A (ja) | 1981-12-10 | 1981-12-10 | 液晶表示装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58100174A (US06815460-20041109-C00097.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0256746U (US06815460-20041109-C00097.png) * | 1988-10-19 | 1990-04-24 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62240935A (ja) * | 1986-04-14 | 1987-10-21 | Seiko Epson Corp | 空間光変調器 |
| JP3066192B2 (ja) * | 1992-07-10 | 2000-07-17 | シャープ株式会社 | 反射型アクティブマトリクス基板の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5694386A (en) * | 1979-12-27 | 1981-07-30 | Suwa Seikosha Kk | Liquiddcrystal display unit |
-
1981
- 1981-12-10 JP JP56198855A patent/JPS58100174A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5694386A (en) * | 1979-12-27 | 1981-07-30 | Suwa Seikosha Kk | Liquiddcrystal display unit |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0256746U (US06815460-20041109-C00097.png) * | 1988-10-19 | 1990-04-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58100174A (ja) | 1983-06-14 |
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