JPS62219312A - Monitor device for minute parts - Google Patents

Abstract

PURPOSE:To execute the grinding with an extremely high accuracy, by providing a TV camera and a stroboscopic device, and monitoring a grinding surface by a TV image. CONSTITUTION:When minute parts 19 which are rotated together with a rotating body 16 and brought to grinding by a grinding means 25 reach the front of a microscope 35, a stroboscope device 43 emits light beams to the minute parts 19 for a short time, and its reflected light beams are caught by a TV camera 38 through the microscope 35. The TV camera 38 enlarges an instantaneous state of the minute parts 19 which are rotating and moving, by the microscope 35 and executes its image pickup, it is caught in the same state as the minute parts 19 are standing still, and the grinding surface of the minute parts 19 being in the course of grinding is enlarged on a TV screen and reproduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a micro-component monitoring device that monitors the entire shape of a polished surface of a micro-component such as a video head that is subjected to shaping and polishing.

[Conventional technology]

Usually, the characteristics of a video head, which is a minute component, are determined by how closely the magnetic tape and head are brought into contact.

For this reason, the surface of the head, that is, the tape contacting surface, must be shaped and polished so that it can come into good contact with the magnetic tape.

By the way, conventionally, as described in Japanese Patent Application Laid-open No. 58-1826, abrasive tape has been wrapped around a commercially available VTR cylinder assembly and the head has been shaped and polished by attaching it to a rotating disk. The grinder head rotates at high speed together with a rotating disk to run on the tip of the head using an abrasive tape (grinding tape). A method is adopted in which the head is shaped and polished little by little by making contact with it.

However, with these polishing methods, it is not possible to know how the polished shape of the head is changing during forming polishing, and the head may be ground too much than the specified size and become defective, or it may not be ground enough and the head must be ground again. There are inconveniences such as the need to repair.

For this reason, Kutsuko, who monitors the polished surface of the head being formed and polished, temporarily stops the polishing device, removes the head, magnifies the head surface with a microscope and checks the shape, and sometimes interference fringes appear on the head surface. There is now no choice but to take measures such as letting the particles dry and checking their shape using a microscope.

However, such monitoring has the disadvantage that not only is workability poor and the yield of the head reduced, but also that the amount of polishing of the head cannot be accurately controlled. .

In forming polishing, in which a head attached to a rotating disk rotates at high speed and comes into contact with a running abrasive tape, the head is not directly monitored, but the surface condition of the abrasive tape in contact with the head is monitored by interference. There is a method of observing with a striped lens and estimating the polishing state of the head from the deformation state.

However, in this case, it is possible to indirectly check the polishing condition of the head during forming polishing, but this check lacks accuracy, and moreover, cracks, cracks, and chips on the tape contact surface can be checked. It has no ability to detect shape defects such as.

[Problem that the invention seeks to solve]

Therefore, the present invention takes the above points into consideration and provides a means for directly monitoring the polished surface of the microcomponent during shaping and polishing when microcomponents such as video heads are rotated at high speed and subjected to shaping and polishing. This is a technical issue.

[Means to solve all problems]

The present invention provides a monitoring device for a micro-component that is attached to the outer periphery of a rotating body, rotates together with the rotating body, and is polished by a polishing means. T to image the surface through a microscope
The polishing surface I is equipped with a V-camera and a strobe device that emits light for a short time to the microcomponents located in front of the microscope.
This system is characterized by monitoring using TV images.

[Effect]

In the micro-component monitoring device of the present invention, when the micro-component that rotates with the rotating body and is polished by the polishing means reaches the front of the microscope, the strobe device emits light to the micro-component for a short time, and the reflected light is emitted. It is captured by a TV camera through a microscope.

In other words, the TV camera uses a microscope to magnify and image the instantaneous state of the rotating and moving microcomponent, capturing the microcomponent in the same state as if it were stationary, and showing the microcomponent being formed and polished. The polished surface is enlarged and reproduced on the TV screen.

〔Example〕

Next, we will discuss 1 when this invention is applied to a video head.
Embodiments will be described in detail with reference to drawings showing examples.

Figure 1 shows the overall configuration of the device, where (1) shows the base, (2) shows the first table fixed on the base [11],
(3) is a first slide plate supported on the first table (2) so as to be slidable in the left and right direction G; (4) is a second table fixed on the first slide plate (31); (5) is a second table [41] supported slidably in the front-rear direction (
The slide plates (6) and (7) are the second slide plate (5
), (8) is the third table in the vertical direction fixed to
This is a sub-base supported by the table tG+e ('y) so as to be slidable in the vertical direction.

(9) is a motor support plate that is fixed to the right side of the first table (21) on the base [+1 and supports a swing motor (not shown); A swinging eccentric cam (11
) is a roller rotatably supported on the first slide plate (3). (1
1) is configured to come into contact with the circumferential surface of the eccentric cam (10), and the rotation G of the eccentric cam (10) causes the first slide plate (3) to swing from side to side via the roller.

(1 匈 is the second table (4) f fixed support plate, (
13) is a polishing amount adjusting micrometer that is supported by the support plate (12) and whose tip is connected to the second slide plate (5). Finely adjusted in the front and back direction. (14) is the sub-base (8
) is a vertical adjustment micrometer whose tip is connected to the second slide plate (5), and the sub-base (8) is finely adjusted in the vertical direction with respect to the third table (61, (7)).

Therefore, the sub-base (8) swings left and right due to the rotation of the cam [101], and both micrometers (1
3+? (From 141G onwards, the front and rear directions and the vertical direction will be finely adjusted.

(15) is a stepping motor installed vertically through the right end of the sub-base (8); (16) is the stepping motor
The upper end of the rotating shaft (5) is a rotary disk that becomes a rotating body, and as shown in FIGS. 2 and 3, the outer periphery of the disk (16) )
A video head (19) consisting of a head chip (18) at the tip is shaped so that it can be attached with two screws.

Reference numeral 120) denotes a detection disk mounted on the lower end of the rotating shaft of the motor (15), and the disk (20) is provided with a slit (21) located on a straight line passing through its center. There is.

(22 is an optical sensor that is installed directly under and close to the disk 120) to detect the slit (21), and the position of the rotating disk (16) when a detection signal is output from the sensor (22) is determined by one rotation. Based on this position, the timing at which the video head (19) on the rotating disk (16) is positioned in front of the microscope, which will be described later, is set.

(23) is a reel fixing plate fixed to the right rear part of the base +11, (24) is a supply reel shaft penetrating through the lower part of the fixing plate (23), and the shaft end of the reel shaft (24) is The reel stand is fixed, and the abrasive tape (which serves as the abrasive means) is attached to it.
A supply reel (26) wound with 25) is attached. (2η is a reel driving motor supported on the upper part of the fixed plate (23), (2 (to) is a supply reel (take-up reel for winding up the abrasive tape (25) from the ground,
A reel stand is fixed to the rotating shaft of 71, and a take-up reel (28) is attached to this via a back brake made of felt or the like, and the take-up reel i2 (to ) rotates while slipping against the reel stand, winding up the abrasive tape with appropriate tension.

The evil is both reels +261 on the fixed plate (23), e
281, the polishing operation body is attached to the front side of the middle part of the polishing tape (281) so that the angle and position can be adjusted freely.As shown in FIGS.
! a metal support part (31) provided with r, and the support part (31)
The abrasive tape (2I5) from the supply reel (26) consists of an elastic body such as rubber (3 parts) adhesively fixed to the front surface of the
passes through the operating body (X!!r)' and is wound onto the take-up reel ball. Then, the abrasive tape (25) running in close contact with the n-side of the elastic body part (32) is pressed against the head chip (18) of the video head (19) which is rotating together with the disk (16). For this reason, the head chip (181) is polished using the polishing tape (25).

Here, the reason why the polishing operating body (29) is provided with an elastic body opening is when the head chip (18) rotating at high speed comes into contact with the polishing tape (251).
This is to prevent cracks from occurring in the polishing pad, and also to function as a pad to increase polishing efficiency. Also, this elastic body part is formed in a mountain shape, but this is because the tip of the head tip (18) is processed into the shape shown by the dashed dotted line in FIG. By using abrasive tape cuts 5) on the upper and lower sides, it is possible to polish the lower and upper sides of the tip of the head tip (18), respectively.

(33) is a fourth table fixed to the left side of the sub-base (8); (34) is a slide plate for holding a microscope supported on the table (33) so as to be able to slide from side to side;
3-yen is a microscope that is long in the left-right direction and has an objective lens (C) installed on the slide plate (34) via a holder (3G) at the tip (right end), and has an objective lens (C) attached to the rotating disk (16).
It is located on a straight line in the left-right direction passing through the center of the rotating disk (16) on the left side of the rotary disk (16). (38) is a rotating video head (
19) is a TV camera that images the surface of the head chip (18), that is, the polished surface, through a microscope (351).

(39) is a support plate fixed to the left end of the sub-base (8), and between the support plate (39) and the connection plate 140 integrated with the holder (36) (coil spring ( 41) is stretched. (42 is a focus adjustment micrometer supported by the support plate (39) and whose tip is connected to the connecting plate (40), which is then connected to the connecting plate (40) and the holder. (
(4), the position of the microscope (35) is adjusted in the left-right direction relative to the sub-base (8), and the focus of the microscope (35) on the head chip (18) is adjusted.

(43) is a strobe device installed upright on the top surface of the tip of the microscope (3 η The video head (1) of the rotating disk (16)
9), the reflected light is transmitted through a half mirror by the force of the objective lens, and is magnified inside the microscope (30) and displayed on the TV.
Camera (given to 3 lads).

In addition, in Fig. 4, the stepping motor (1) is the stepping motor (1).
5), which outputs a drive pulse according to the oscillation frequency from the oscillation circuit (4 (to) to the motor (l [9),
The motor (16) is driven to rotate.

(461 is the CPU, and the slit f211 of the disk
A detection signal from the optical sensor 1221 for detection is input. The position of this C'PU (in 461, the rotating disk 06 when the detection signal is input) is determined by the disk (16).
This rotation is divided into finely equal parts, from the position of the sensor to the position of the video head (19) in the rotational direction of the rotating disk (16), and the position facing the front of the microscope (34). In addition, the number of pulses when the video head (19) that rotates along with the rotating disk (II) is positioned in front of the microscope (as shown in FIG. The number of pulses is counted from the position, and when the set number of pulses is reached, a drive signal is output to the strobe transmitter (47) that drives the strobe device (four steps). A synchronizing signal is output from 4el to the drive circuit (44).

The decoy is an operation panel installed on the base fli.

By the way, in the above-mentioned apparatus, what is particularly important is that the video head (1) on the rotating disk (1 (support)
When the microscope (19) reaches the front of the 3-yen shop, the strobe device (the strobe device) should always flash at the same position, that is, the rotating disk (+61) should not cause uneven rotation, and the flash time of the strobe device (the flash time of the strobe device should be as short as possible). In this way, camera shake (image shake) caused by high-speed rotation of the video head 09) can be eliminated.

'Then, first of all, if you want to eliminate the rotational unevenness of the rotating disk (country), it is possible to use a commercially available motor with less rotational unevenness as the motor that rotates the rotating disk (country). This will affect the flash position of the strobe device, causing variations in its position and making the TV screen unstable.
V screen occurs).

Here, it is possible to eliminate uneven rotation by increasing the motor output and installing a large flywheel so that it rotates at high speed so that there is not much variation between no-load and load conditions, but it is expensive. Become something.

Therefore, in the embodiment, a stepping motor (15) with a minimum step angle is used. In other words, in a commercially available stepping motor (oriental motor), 5
A phase excitation type with a step angle of 0.36° (1 rotation 1
000 pulse), which is used. Therefore, by using the pulses of the stepping motor (15), the positions of the video head (19) and the microscope (g) are read out in pulse numbers from the reference position detected by the optical sensor (6) to the position of the strobe device (431). If the flash timing is set, even if there is rotational unevenness in the motor (15) itself, only the rotational unevenness within one pulse will affect the flash position, and rotational unevenness can be tolerated to a large extent.

Note that the detection ability of the optical sensor (2), that is, the response time, must not be less than "c" within 1 pulse 2 of the stepping motor (!5).
One rotation is 1000 pulses, and if the oscillation circuit (4-way frequency is 10 KHz), the motor (10j rotation speed is 6
00 r, p.

m, the stepping motor (one pulse time in Japan is 100 μs). Therefore, an optical sensor (221') with a shorter response time (for example, 20 μs) is used.

Next, I will explain the flash time of the strobe device.

In the example, a video head (on a rotating disk (lfN)
Since the first point is located at the radius r # 30fi, the circumferential speed at that time, that is, the moving speed of the video head (19) is 2πrx600[r,p,m:]]/6O-2x
3.14x300001μm]x10[r,p,s)#
1885000[:grrVS:I.

Here, the high-speed rotating video head (19) i In order to see it equivalently to a stationary state, Kako placed it under a microscope (35).
Since it is necessary to enlarge the image and view it as a TV image, a strobe device (4
3 (ζ Therefore, the actual length of irradiation must be 1 μm or less.

Therefore, in order to make the irradiation length 1 μm or less for the above-mentioned circumferential speed, it is necessary to rush the strobe device (43) on the order of nS. A light (commercially available products can be used if the flash time is about Q5QIIS) is used.

Note that when a strobe device (43) 'e with an extremely short flash time as described above is used, the amount of light is small and the brightness is insufficient to be displayed as a TV image, resulting in a dark image.

For this reason, in the embodiment, the flash light from the strobe device (43) is used as internal irradiation, and a half mirror 2 condensing lens is used to irradiate the flash light in a spot on the necessary location. Since brightness is required as the TV camera (38), a camera capable of producing bright images, such as a Carnicon camera, is used to solve the above problem.

Next, the operation of the above embodiment will be explained.

First, turn on the power switch on the operation panel (Shuto),
A current is passed through each circuit to bring it into a neutral state.

Next (this, rotating disk (+6) i this video head (1)
9), and then turn on the start switch to start driving the stepping motor (15).

At this time, the motor (151!
G) and the disk (20) rotate at the same time, and the reference position of the rotating disk (16) is detected by the detection signal of the optical sensor (24) which detects the slit i21+k of the disk (20).
The CPU (46) counts the number of pulses from this position and lights the strobe device (431) at the timing when the video head (19) is positioned in front of the microscope (to).

Therefore, the light irradiated onto the front surface of the head chip (18) is magnified by the microscope 05), captured by the TV camera 8), and projected onto the TV screen.

This strobe device (43) emits light from the head chip (lI
The head chip (18) appears to be stationary (as it appears on the TV screen) as the reflected light is captured by the TV camera (38). This will happen.

At this point, while looking at the ゛V screen, use a micrometer (44
and move the microscope (351) to adjust the focus.

Next, the reel drive motor 12 is activated to start running the abrasive tape 4, and then both micrometers and
:I3+, (adjust 14+ to sub-bass (8)
ft and presses the tip of the head chip (18) of the video head (19), which is rotating at high speed together with the rotating disk (16), against the abrasive tape (25) that is running while closely contacting the front surface of the abrasive operation body, and the polishing is performed. Start processing.

At this time, when the swing motor is driven, the sub-base (8
) The whole body swings from side to side, and the position where the abrasive tape (251f) of the rotating Dinuku head chip (18) comes into contact with it is displaced from side to side, increasing the utilization efficiency of the abrasive tape (2119).

As described above, the tip of the head chip (18) of the video head (18) is polished. During this polishing operation, the polishing tape (25+1) is polished while rotating at high speed together with the rotating disk (16). The polished surface (tape contact surface) of the head chip (18) being polished is displayed as a still image on the TV screen, and the shape of the head changing as the polishing progresses can be confirmed.

When viewing this polished surface on the ITV TV screen, if a scale line is generated along with the still image on the TV screen using an image digital or baseline generator, it is extremely easy to control the polishing of the required dimensions while looking at the TV screen. be.

Furthermore, if an interference fringe lens is used, it is also possible to measure the shape of the polished surface.

Here, as in the embodiment, a stepping motor (15)' is used as the rotating motor for the rotating disk (16)! ! - If used, the reference position may be detected by the optical sensor (22) at the boundary position that divides one rotation;
In such a case, no matter how highly accurate detection is possible, some unevenness may cause the flash position to shift by one pulse.

However, although there are such exceptions, if one rotation of the rotating disk (16) is divided into large equal parts as in the above embodiment, even if a deviation of one pulse occurs, there will be no large deviation, and the TV It is possible to obtain images in a static state.

In addition, in the embodiment, a video head (19
) (I have explained this in detail, but this is not limited to audio heads, pickup G for optical playback discs, etc.)
Of course, this method can be applied to micro parts that are polished, such as diamonds.

In addition, as a polishing means, abrasive tape (2-yen was used, but
Other means capable of polishing small parts that rotate with a rotating disk may also be used.

〔Effect of the invention〕

As described above, according to the micro-component monitoring device of the present invention, the polished surface of the micro-component that rotates with the rotating body and is polished by the polishing means is magnified during the polishing process in the same state as if it were stationary. The cracks on the polished surface can be seen on the TV image.

In addition to detecting cracks and chips, it is possible to realize extremely high-precision molding and polishing while observing the constantly changing polishing conditions, improving workability 2 and yield, and obtaining micro parts with excellent quality. It is something that can be done.

[Brief explanation of drawings]

The drawings show one embodiment of the micro-component monitoring device of the present invention, in which FIG. 1 is an overall perspective view, FIG. 2 is a perspective view showing a rotating disk and its rotation detection portion, and FIG. 3 is a perspective view of a video head. , FIG. 4 is a schematic block diagram, and FIG. 5 is a running system for the abrasive tape. (16) Rotating disk, (19) Video head, i5) Polishing tape, side Microscope, (3
8)...TV camera, (431...strobe device.

Claims (1)

[Claims] (1) In a monitoring device for a microcomponent that is attached to the outer periphery of a rotating body and rotates together with the rotating body to be polished by a polishing means, the polished surface of the microcomponent that is provided on the side of the rotating body and is rotating. A method for monitoring microcomponents comprising: a TV camera that captures an image of the microcomponent through a microscope; and a strobe device that emits light for a short time at the microcomponent located in front of the microscope, and monitors the polished surface using a TV image. Device.