JPS6221065U - - Google Patents
Info
- Publication number
- JPS6221065U JPS6221065U JP11208785U JP11208785U JPS6221065U JP S6221065 U JPS6221065 U JP S6221065U JP 11208785 U JP11208785 U JP 11208785U JP 11208785 U JP11208785 U JP 11208785U JP S6221065 U JPS6221065 U JP S6221065U
- Authority
- JP
- Japan
- Prior art keywords
- thin films
- housings
- pair
- target
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11208785U JPS6221065U (sv) | 1985-07-22 | 1985-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11208785U JPS6221065U (sv) | 1985-07-22 | 1985-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6221065U true JPS6221065U (sv) | 1987-02-07 |
Family
ID=30992624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11208785U Pending JPS6221065U (sv) | 1985-07-22 | 1985-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221065U (sv) |
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1985
- 1985-07-22 JP JP11208785U patent/JPS6221065U/ja active Pending