JPH0322063U - - Google Patents
Info
- Publication number
- JPH0322063U JPH0322063U JP8062389U JP8062389U JPH0322063U JP H0322063 U JPH0322063 U JP H0322063U JP 8062389 U JP8062389 U JP 8062389U JP 8062389 U JP8062389 U JP 8062389U JP H0322063 U JPH0322063 U JP H0322063U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- thin film
- film material
- evaporation source
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000007733 ion plating Methods 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8062389U JPH0322063U (sv) | 1989-07-07 | 1989-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8062389U JPH0322063U (sv) | 1989-07-07 | 1989-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322063U true JPH0322063U (sv) | 1991-03-06 |
Family
ID=31625848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8062389U Pending JPH0322063U (sv) | 1989-07-07 | 1989-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322063U (sv) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011156088A (ja) * | 2010-01-29 | 2011-08-18 | Kyoraku Sangyo Kk | 遊技機 |
| JP2011156090A (ja) * | 2010-01-29 | 2011-08-18 | Kyoraku Sangyo Kk | 遊技機 |
-
1989
- 1989-07-07 JP JP8062389U patent/JPH0322063U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011156088A (ja) * | 2010-01-29 | 2011-08-18 | Kyoraku Sangyo Kk | 遊技機 |
| JP2011156090A (ja) * | 2010-01-29 | 2011-08-18 | Kyoraku Sangyo Kk | 遊技機 |
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