JPS6221065A - Spring-contact type probe - Google Patents

Abstract

PURPOSE:To enable automatic measurements of a number of probes with a single unit of measuring device, by incorporating a switch circuit in a probe connector and making a probe measuring signal available from outside of the probe. CONSTITUTION:Until a contact member 2a of a needle 2 is held as contacted with a test piece to obtain a stabilized measuring signal by application of a delay circuit 12 on the driving terminal side of a lead-relay 8, input of a falsely measured signal is delayed. On the other hand, utilizing this delay action, in response to measuring speed of the measuring device, switching of a measurement excecution probe is performed. Consequently, for instance, for a large- scaled inspecting system using 100 probes and more, by ON/OFF action of the lead-relay 8 provided with each probe, different measuring signals from each position become available for handling with a single measuring device.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a spring contact type probe, and more particularly to an improvement of a spring contact type probe used for measuring electrical characteristics of various circuit boards, particularly high frequency voltage characteristics.

[Conventional technology]

In recent years, rapid technological advances have been made in new media, OA, optical communications, semiconductors, etc., and with this, so-called "contact technology for contact points between parts" and "connection technology for connecting contacts" have been made. There is a strong demand for higher precision and higher performance of "connection technology" as a basic technology common to various new technologies.

As a specific example, contact type probes, especially springs, which constitute the main part of the inspection equipment are used in semiconductor/LSI inspection systems, especially in the inspection process that measures the electrical characteristics of various circuit boards such as printed circuit boards and ceramic multilayer boards, such as high frequency voltage.・Contact type probes are related to so-called contact technology and connection technology, in order to solve the problem of inspecting a large number of measurement signals by comparing and checking the electrical characteristics mentioned above. The probe itself could not be controlled and required a large number of wiring lines, making high-density packaging difficult. Furthermore, it has been difficult to realize a large-scale measurement system configuration, such as when performing measurements using a large number of probes simultaneously, or when performing logical processing such as comparing and checking measurement signals of probes. Furthermore, it has been difficult to realize multi-purpose measurements, such as programmable control, with one measuring device. Further, the switch circuit cannot be provided near the needle of the probe, which adversely affects the electrical characteristics.

[Problem that the invention seeks to solve]

However, recently, automatic processing of input/output signals during measurement for spring contact type probes has been developed.

There is a growing desire to realize high-density packaging and large-scale measurement system configurations. A spring contact type probe with controllable output is required.

In addition, the above-mentioned spring contact type probe is required, which can measure many probes with one measuring device and realize applied measurement for multi-purpose measurement.

[Means and effects for solving the problems] As described above, the present invention incorporates a switching circuit in the connector part of the spring contact type probe, and controls the switching circuit, for example, the ON/OFF state of the reed relay, to turn the probe on and off. By making it possible to control input/output of measurement signals from outside the probe and by sequentially switching multiple probes,
The purpose of this invention is to enable automatic measurement using a stand-alone measuring device, and also to automatically turn off the operation of the probe when an unstable element of a predetermined amount or more is added to the measurement signal.

〔Example〕

Hereinafter, the present invention will be explained in detail using the drawings.

The drawing is a partially sectional perspective view showing an embodiment of the present invention.

First, to explain the configuration, (1) is the tip of the probe. For example, when the pointed contact part (2a) receives contact pressure, it generates a spring repulsion force and is crimped by a spring (2a).
3) and a spring probe (4) that mounts the spring (3).

This shaft core (la) is attached and fixed to the center of a cylindrical dielectric (5) made of Teflon, polyimide ceramic, etc. with the needle (2) protruding from it.
Further, the outside of the dielectric (5) is tightly fitted by a coaxial outer conductor (6) made of copper or stainless steel.

(7) is a connector part that electrically connects the probe tip part (1) with a coaxial cable (10) at the other end, and the center axis of the connector part (7) is There is a reed relay (8) linearly connected at both ends with an internal conductor (9) above, and a relay contact (
A coil (10) is disposed closely facing the relay contact (8a) across a protective glass (8b) that protects the relay contact (8a). The above coil (lO) is 0N-OF in the measuring device.
F operably connected. (11) is a coaxial cable, which connects the connector part (7) to the tip of the probe (
1), and electrically connected through an internal conductor (9) including the reed relay (8). (12)
is a delay circuit connected to the drive terminal side of the coil (10) of the reed relay (8).

Next, the operation of this embodiment will be explained.

The contact part (2a) of the needle (2) is held in contact with the test piece (not shown), and the reed relay (8)
By using a delay circuit (12) provided on the drive terminal side of the sensor, input of an erroneous measurement signal can be delayed until a stable measurement signal is obtained. On the other hand, by utilizing this delay effect, the measurement execution probe can be switched in accordance with the measurement speed of the measurement device (not shown).

Further, according to this embodiment, in a large-scale inspection system using, for example, 100 or more probes, different measurement signals from each probe can be transferred to one probe by the 0N10FF operation of the relay (8) provided in each probe. Processed by measuring equipment.

Next, as another embodiment of the present invention, if a logic circuit (not shown) is connected to the delay circuit (12) of the above embodiment, if an unstable element exceeding a predetermined amount is added to the measurement signal, the circuit will probe the signal. The operation can be automatically turned off.

Further, the reed relay (8) may be a switching circuit made of a semiconductor, and therefore various changes can be made without departing from the scope of the claims of the present invention.

〔Effect of the invention〕

As explained above, according to the present invention, by incorporating a switching circuit into the connector part of a spring contact type probe, it is possible to control the input and output of the measurement signal from outside the probe during measurement, and moreover, it is possible to control the input and output of the measurement signal from the outside of the probe. can be measured with a single measuring device, for example, using a programmable controller, and can achieve great effects such as realizing applied measurement for multi-purpose measurements.

[Brief explanation of drawings]

The drawing is a partially sectional perspective view of a spring contact type probe showing an embodiment of the present invention. (2)...Needle (7)...Connector part (8)...Reed relay (9)...
...Inner conductor (10) ...Coil (1
1) Coaxial cable (12) Delay circuit

Claims (5)

[Claims] (1) A probe tip portion having a needle with a contact portion formed at the tip, a spring attached to the needle and crimped by a spring repulsive force generated by the contact pressure between the contact portion and the test piece, and a coaxial cable. A spring-contact type probe comprising a connector section for connection to the tip of the probe, and a coaxial cable integrally attached to the tip of the probe via the connector section and electrically connected thereto, wherein the connector section is equipped with a switching circuit. A spring contact type probe characterized by a built-in. (2) The spring contact type probe according to claim 1, wherein the switching circuit is a reed relay. (3) The spring contact type probe according to claim 1, wherein the switching circuit is made of a semiconductor. (4) The spring contact type probe according to any one of claims 1, 2, and 3, characterized in that a delay circuit is connected to the drive terminal of the switching circuit. (5) The spring contact type probe according to any one of claims 1, 2, or 3, characterized in that a delay circuit and a logic circuit are connected to the drive terminal of the switching circuit. .