JP2002025410A - Multiplex reed relay - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a multiplex reed relay with superior high frequency characteristics. SOLUTION: A reed relay for alternating current signal control 10 and a reed relay for direct current signal control 20 are contained integrally in a single package 30 and at same item, one ends 13a, 23a, 24a of reed switches 13, 23, 24 for each reed relay 10, 20 is connected with another in the package 30, to obtain a multiplex reed relay 1 with improved high-frequency characteristics due to the decrease in capacitance.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reed relay, and more particularly, to a reed relay formed by combining a plurality of reed relays (hereinafter referred to as "combined reed relay"). For example, it is used for a G / W inspection process of a wafer and an inspection of an IC, etc.
The present invention relates to a composite reed relay suitable for use in devices requiring high high-frequency performance such as so-called "IC tester pin cards" and "pin electronics cards" (hereinafter collectively referred to as "IC tester pin cards"). .

[0002]

2. Description of the Related Art In various measuring devices and other devices,
There is a configuration in which a relay is provided to control the input and output of a test signal and other signals, and a desired test or the like can be performed by switching a test signal or the like input and output by the relay.

As an example, in a semiconductor device manufacturing process, the quality of a wafer is determined (G / W inspection process), and whether a manufactured IC or the like has electric characteristics based on a predetermined product standard is inspected. In order to perform measurement, an IC or the like is connected to a tester having a built-in computer through an IC tester pin card, and various electrical inspections and measurements are performed.

The above-mentioned IC tester pin card used for this inspection and measurement has a connecting device (hereinafter, referred to as a probe) provided with a plurality of probes arranged in correspondence with input / output terminals of an IC or the like. A probe for wafer inspection is called a “prober”, and an IC for IC inspection is called a “handler”, and an inspection signal from a tester is input to input terminals and various control terminals of an IC or the like via the prober or the handler. At the same time, an output signal output from the output terminal is input to the tester, and the output signal input to the tester is compared with a correct output signal stored in advance to determine whether the wafer or the IC is good.

In the inspection of such electric characteristics,
Apply DC frequency characteristics related to power supply current, input / output voltage and current level, and high-frequency inspection signals corresponding to the operating speed of the IC to be inspected to input terminals and various control terminals, and correct the waveform output from the output terminal to the correct waveform. An inspection of the AC characteristics to be compared with is performed.

[0006] When testing the electrical characteristics as described above, a reed relay is used as a control means for switching the connection between each probe and the tester in accordance with a combination of paths through which electricity passes in the IC. FIG. 4 (A) shows an “AC line” composed of a reed relay for controlling and a “DC line” composed of a reed relay for controlling a DC signal.
And a control circuit as shown in FIG. 4 (B).

In the example shown in FIGS. 4A and 4B,
The description will be made assuming that the terminal A of the IC is set as the input terminal, the terminal X is set as the output terminal, and the path formed between the terminals A and X is to be inspected.

In this example, the tester supplies an inspection signal to a terminal A, receives an output signal output from a terminal X, and
Inspection and measurement. It should be noted that probes and control means connected to terminals that are not to be inspected are omitted in the figure.

FIG. 4 (A) shows an inspection of AC characteristics.
In this case, the control means is AC
When the reed relay that constitutes the line is turned on and DC
The reed relay forming the line is off.
Then, an AC signal corresponding to the operating speed of the IC to be inspected is input to the input terminal A via the AC line, and the output signal output from the output terminal X is similarly connected to the output terminal. The probe is input to the tester via the AC line of the reed relay connected to the probe, and the waveform of the output signal is compared with the waveform stored in advance by the tester to determine the quality of the IC.

When the DC characteristics are to be inspected and measured, as shown in FIG. 4B, the reed relay constituting the DC line in the control means is turned on and the reed relay constituting the AC line is turned on. It turns OFF, and the measurement and inspection of the DC characteristics are performed in the same manner.

The control circuit shown in FIGS. 4A and 4B is composed of a combination of a plurality of (two) reed relays as described above. FIG. 5 and FIG. 6, the single-contact reed relay 10 having one reed switch 13 in this control circuit will be referred to as A in FIG. 4 (A) and FIG. 4 (B).
A C line is formed and two reed switches 2
4 by a two-contact type reed relay 20 provided with
The DC line in FIG. 4A and FIG. 4B is configured. A one-contact reed relay 10 and reed switches 2 for force (F) and sense (S)
The two contact type reed relays 20 including the reed relays 3 and 24 are combined on a board, and one end sides 13 a and 2 of the reed switches 13, 23 and 24 provided on the respective reed relays 10 and 20.
Leads 60e, 70f, 70 connected to 3a, 24a
g is connected by a printed wiring formed on the substrate,
It is connected to one of the probes provided on the prober or handler.

[0012]

As described above, when a plurality of independent reed relays 10, 20 are connected and used on a board, one end 13a of reed switches 13, 23, 24 of each reed relay 10, 20 is used. , 23a, 24a are connected to one end 13a of the reed switch 13, 23, 24,
Leads 60e, 70f, 7 connected to 23a, 24a
0g are connected to each other via wiring or the like printed on the substrate.
f, 70 g, and reed switches 13, 23, 2 outside the reed relays 10, 20 via printed wiring on the board and the like.
In the case where the one ends 13a, 23a, and 24a are connected, problems such as an increase in capacitance generated outside the reed relays 10 and 20 occur.

Such an increase in capacitance causes adverse effects such as delaying signal control when a high-frequency signal is controlled by this type of composite reed relay. When such a composite reed relay is used for a tester pin card or the like, there arises a problem that accurate inspection / measurement of an IC or the like cannot be performed.

Therefore, when a plurality of reed relays are used in combination on a board as described above, it is necessary to make adjustments in consideration of a delay in signal control by the reed relays when designing these devices and devices. In addition, this adjustment is not only complicated, but also has a problem that it is difficult to accurately operate various devices and devices in which such a reed relay is incorporated.

When a plurality of reed relays are combined on a board, the wiring pattern on the board becomes complicated, and a relatively large area must be secured on the board for disposing the reed relays.

SUMMARY OF THE INVENTION An object of the present invention is to provide a composite reed relay formed by combining a plurality of reed relays, whereby an accurate output of a high-frequency signal can be obtained. It is an object of the present invention to provide a composite reed relay that can be used without taking into account delays in output and making special adjustments even when the reed relay is performed.

Another object of the present invention is to reduce the mounting area on a substrate by reducing the size of the composite reed relay in addition to the above-mentioned objects, and to further reduce the size of the entire device using the composite reed relay of the present invention. It is an object of the present invention to provide a composite type reed relay that can be used.

[0018]

In order to achieve the above object, a composite reed relay 1 of the present invention comprises a combination of a reed relay 10 for controlling an AC signal and a reed relay 20 for controlling a DC signal. In the composite reed relay 1 configured to be able to selectively conduct either an AC signal or a DC signal, the reed relays 10 and 20 are respectively disposed in the coils 12 and 22 and the coils 12 and 22. Reed switches 13, 23, 24 which are operated by exciting the coils 12, 22. All of the reed relays 10, 20 are housed in a common package 30, and the reed relays 10 , 20 reed switches 13, 23, 2
4 is characterized in that one end 13a, 23a, 24a is connected.

In the composite type reed relay 1 having the above-mentioned structure, the reed switch 13 of the reed relay 10 for controlling the AC signal is surrounded by a grounded conductor 15 for electrostatic shielding, and the DC signal is controlled. The reed switch (23 and / or 24) of the reed relay 20 may be configured not to be electrostatically shielded.

Further, a plurality of reed switches 23 and 24 are provided in the reed relay 20 for controlling the DC signal, and a part (23 or 24) of the reed switches 23 and 24 is surrounded by a grounded conductor and electrostatically shielded. Can also.

As described above, when the reed relay 20 for controlling the DC signal includes a reed switch (reed switch 23 in FIG. 3) that is not electrostatically shielded, the reed relay 20 that is not electrostatically shielded is used. Preferably, one end 23a is connected to one end 13a, 24a of another reed switch 13, 24 via a resistor 50 having a predetermined value.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described below with reference to the accompanying drawings. The composite reed relay 1 used in the present embodiment is used for inspecting ICs and the like.
Although described as being used for an IC tester pin card for measuring, the use of the composite reed relay of the present invention is not limited to this.

Reference numeral 1 in FIG. 1 is a composite reed relay of the present invention before being covered by a package.

The composite reed relay 1 is composed of a combination of a reed relay 10 for controlling an AC signal and a reed relay 20 for controlling a DC signal.
Each of the reed relays 10 and 20 is provided with a coil bobbin 11 and 21, respectively.
Coils 12, 22 each formed of a wire wound around 1, 21;
The coils 12, 22 are disposed in the coils 12, 22.
Switch 1 provided with contacts operated by excitation of
3, 23, 24 (see FIG. 2).

In the composite reed relay of the present embodiment, the reed relay 10 for controlling the AC signal among the reed relays 10 and 20 is replaced by a single reed switch 13.
And a reed relay 20 for controlling a DC signal is a two-contact type reed relay having two force and sense reed switches 23 and 24. When the types of signals controlled according to the number of measurement items increase or decrease, the number of reed switches may be increased or decreased.

In the embodiment shown in FIG. 1, the reed switch 2 of the reed relay 20 for controlling a DC signal
A conductor 25 made of a copper tube only one of the three 24
, And the electrostatic shield is not performed on the other reed switch 23. However, each of the reed switches 23 and 24 is surrounded by a conductor, The reed switches 23 and 24 may be electrostatically shielded by surrounding the reed switches 23 and 24 with a common conductor.

However, when such an electrostatic shield is provided, one end 13 of each of the reed switches 13, 23, 24 is provided.
a, 23a, 24a, and the capacitance generated between the conductors forming the electrostatic shield increases, and
This electrostatic shield only needs to be performed on at least the reed switch 13 of the reed relay 10 that controls the AC signal, and one or both of the reed switches 23 and 24 of the reed relay 20 that controls the DC signal.
It is also possible to adopt a configuration in which the electrostatic shielding is not performed on 3, 3 and 24.

In FIG. 1, reference numeral 30 denotes a package for accommodating the two reed relays 10 and 20. The coils 12 and 22 of each of the reed relays 10 and 20 are viewed from both ends in the longitudinal direction of the package. , Reed switch 13,
The leads 40 (40a to 40l) connected to the conductors 23 and 24 and the conductors 15 and 25 forming the electrostatic shield protrude.

FIG. 3 shows a circuit diagram of the composite reed relay 1 in the embodiment shown in FIG. 1 configured as described above.

As shown in FIG. 3, the coil 12 of the one-contact type reed relay 10 is connected to the leads 40a and 40f, and the conductor 15 forming an electrostatic shield is connected to the leads 40b and 40h, respectively. Coil 2 of relay 20
2 is connected to the leads 40c and 40i, and the conductor 25 forming an electrostatic shield is connected to the leads 40e and 40l.

Further, one ends 13a, 23a, 2 of the reed switches 13, 23, 24 of the respective reed relays 10, 20 are arranged.
4a (the left side in FIG. 3) is connected to a common lead 40d, and the other end 1 of each of the reed switches 13, 23, 24.
Reference numerals 3b, 23b, and 24b denote leads 40g (lead switch 13) and leads 40j (lead switch 2), respectively.
3) connected to the lead 40k (reed switch 24).

When the reed relay 20 for controlling the DC signal is provided with the reed switch 23 which is not electrostatically shielded as described above, the reed switch 23
23a and one end 1 of the other reed switches 13, 24
A resistor 50 having a predetermined value is provided between 3a and 24a.

This is because in the electrostatically shielded reed switch 24, since the capacitance generated between the reed switch 24 and the conductor 25 is increased and the impedance is reduced, the above-described resistor 50 is built in and the electrostatic capacitance is reduced. This is in order to balance with another unshielded reed switch 23.

The composite reed relay 1 of the present invention having the above-described structure is integrally covered with the above-mentioned package 30 formed of a resin mold, a resin case, or the like. It is formed.

The composite reed relay integrally formed as described above has the I type shown in FIGS. 4A and 4B.
It can be used as a control circuit provided in a C tester pin card.

When the composite reed relay of the present invention is used in place of the reed relay shown in the control circuit shown in FIGS. 4A and 4B, the reed switches 13, 23, 2
4 is connected to an IC or the like to be inspected via a prober or a handler, and a common terminal 40d to which one end 13a, 23a, 24a of the fourth switch 13 is connected.
Terminal 4 connected to the other end 13b, 23b, 24b of 24
0g, 40j and 40k are connected to the tester side.

The terminals 40a, 40f; 40c, 40i connected to the coils 12, 22 are connected to an operating circuit (not shown) for operating the composite reed relay 1,
Either the C line or the DC line can be selectively switched according to the output signal from the tester.

When the composite reed relay 1 of the present invention is used by being incorporated in the circuits shown in FIGS. 4A and 4B as described above, a plurality of reed relays are connected on a substrate to form a composite reed relay. As compared with the conventional reed relay (see FIGS. 5 and 6), the inspection signal and the like can be controlled quickly and accurately.

[0039]

According to the configuration of the present invention described above, the composite reed relay of the present invention has the following effects.

1. A reed relay for controlling the AC signal,
The reed relay for controlling the DC signal is housed in a common package, and the ends of the reed switches of both reed relays are connected in this package, thereby connecting the ends of the reed switches on the board. The capacitance could be reduced as much as possible as compared with the conventional reed relay.

Accordingly, the composite reed relay of the present invention
It has improved high-frequency characteristics as compared with a composite reed relay conventionally connected on a substrate.

Further, by employing the above-described configuration, the composite reed relay can be compactly assembled, and the area occupied by mounting on a substrate can be reduced.

2. In addition, by providing a reed switch that is not electrostatically shielded among a plurality of reed switches, the capacitance generated between the contact of the reed switch and the ground can also be reduced. As a result, a composite reed relay with improved high-frequency characteristics was obtained.

3. Further, the connection between one end of the electrostatically shielded reed switch and one end of the non-electrostatically shielded reed switch is performed through a resistor having a predetermined value, thereby increasing the capacitance due to the electrostatic shield. The decrease in impedance can be compensated, and the control by the composite reed relay of the present invention can be made accurate.

[Brief description of the drawings]

FIG. 1 is a plan view of a composite reed relay showing one embodiment of the present invention before being housed in a package.

FIG. 2 is a perspective view of a reed switch.

FIG. 3 is a circuit diagram of the composite reed relay of FIG. 1;

4A and 4B are schematic diagrams showing an example of use of a composite reed relay, wherein FIG. 4A is a state where an AC line is ON, and FIG.
The line C indicates an ON state.

FIG. 5 is an explanatory view showing a conventional example when a plurality of reed relays are combined.

FIG. 6 is a circuit diagram of FIG. 5;

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 composite reed relay 10 reed relay (for controlling AC signal) 11, 21 coil bobbin 12, 22 coil 13, 23, 24 reed switch 15, 25 conductor (for electrostatic shielding) 20 reed relay (for controlling DC signal) ) 30 Package 40 (40a to 40l) Lead 50 Resistance 60 (60a to 60f) Lead 70 (70a to 70h) Lead A Input terminal of IC X Output terminal of X IC

Claims (4)

[Claims] 1. A composite reed relay comprising a combination of a reed relay for controlling an AC signal and a reed relay for controlling a DC signal and configured to selectively conduct either an AC signal or a DC signal. Each of the reed relays includes a coil and a reed switch arranged in the coil and operated by excitation of the coil, and both the reed relays are housed in a common package, and in the package, A composite reed relay wherein one end of a reed switch of the reed relay is connected. 2. A configuration in which the reed switch of the reed relay for controlling the AC signal is surrounded by a grounded conductor and electrostatically shielded, and the reed switch of the reed relay for controlling the DC signal is not electrostatically shielded. 2. The composite reed relay according to claim 1, wherein: 3. The reed relay for controlling the DC signal includes a plurality of reed switches, at least one of the reed switches.
3. The composite reed relay according to claim 2, wherein each of the relays is surrounded by a grounded conductor and electrostatically shielded. 4. The reed switch, wherein one end of the reed switch that is not electrostatically shielded is connected to one end of another reed switch via a resistor of a predetermined value.
The combined reed relay described.