JPS62208842A - Vacuum adsorbing device - Google Patents

Abstract

PURPOSE:To hold various samples on an adsorbing plate by providing the adsorbing plate having multiple vacuum adsorbing ports, multiple opening/closing valve means communicated to individual vacuum adsorbing ports, and a selector valve means commonly communicated to individual opening/closing valve means. CONSTITUTION:When a sample is mounted on an adsorbing plate 1, a control unit 5 selects an opening/closing solenoid valve communicated to an adsorbing hole necessary to adsorb the sample and drives it to an open position. Next, a selector solenoid valve 4 is transferred to the vacuum source side. Thereby, the vacuum pressure is applied to the adsorbing hole below the sample, and the sample is adsorbed and fixed on the adsorbing plate 1. In this case, no vacuum pressure is applied to adsorbing holes outside the sample. After necessary process for the sample is completed, the selector solenoid valve 4 is transferred to the air pressure source side. Accordingly, pressurized air is fed to the adsorbing hole below the sample, and the sample is forcibly removed from the adsorbing plate 1.

Description

[Detailed Description of the Invention] [Field of the Invention] The present invention relates to a vacuum suction device for suctioning and fixing a sample such as a liquid crystal glass substrate or a semiconductor sea urchin, and in particular, the suction area can be changed depending on the size of the sample. Regarding improvements to make it so.

[Background of the Invention] Liquid crystal display devices are used as information display means in combination with various electronic devices because they can be driven at low voltages, consume little power, and can be made extremely thin. Demand for large-sized display devices is increasing because the device can maintain its thin shape. The display panel of such a liquid crystal display device is constructed by sealing a liquid crystal material between two glass substrates on which transparent electrodes are formed. When performing various processes such as forming electrodes on such a glass substrate, or when transporting a glass substrate between processes, a vacuum suction device is used to securely hold the glass substrate. in this case,
There is a need for a highly versatile vacuum suction device that can reliably hold glass substrates of various sizes.

[Prior art] Conventionally, this type of device has been constructed of a suction plate with suction hole positions for a specific sample size, so when changing the sample size, it takes time and effort to replace the suction plate, and the suction The disadvantage was that several boards were required. In order to have versatility with a single suction plate, since the adsorption range was limited to the smallest sample size, other sample sizes would not be adsorbed around the edges, resulting in insufficient adsorption force and insufficient fixation. It had the disadvantage of being. In addition, if multiple switching valves are used, each of which is connected to each suction hole, and vacuum pressure is applied by selecting the suction hole according to the size of the sample, the sample is fixed and released. Therefore, a plurality of switching valves must be switched at the same time, and the piping becomes complicated.

[Object of the Invention] The present invention has been made in view of the drawbacks of the prior art, and includes: The purpose of the present invention is to provide a vacuum suction device that has a unique structure, can securely hold various samples of different sizes on one suction plate, and can easily perform suction and removal operations.

[Embodiment] FIG. 1 shows the configuration of an embodiment of a vacuum suction device according to the present invention. Multiple vacuum suction ports (suction holes) 2 on the top surface of the suction plate 1
a to 2e are provided. Each suction hole 2a-2e communicates with an on-off electromagnetic valve 3a-3e via piping 6a-6e.

Each of the on-off solenoid valves 3a to 3e is a two-position solenoid valve with an open position and a closed position, and all figures show the closed position. Each of the on-off solenoid valves 3a to 3e communicates with a common switching solenoid valve 4.

This switching solenoid valve 4 can be switched and communicated with a pneumatic source (pressurized air source) and a vacuum source, and the figure shows the open/close solenoid valves 3a to 3e and the switching solenoid valve 4 connected to the pneumatic source. is connected to the control section 5 and its operation is controlled.

The operation of the vacuum suction device having the above configuration will be explained below. When a sample (not shown) is mounted on the suction plate 1, the control unit 5 selects an on-off solenoid valve that communicates with the suction hole (suction hole located on the bottom surface of the sample) necessary for sample suction according to the sample size. drive it to the open position. Subsequently, the switching solenoid valve 4 is switched to the vacuum source side. As a result, vacuum pressure is applied to the suction hole at the bottom of the sample.
y Kanro Tanaka 7 Handles 1 When 〒, vacuum pressure does not act on the suction hole on the outside of the sample. After the necessary processing for the sample is completed, the switching solenoid valve 4 is switched to the air pressure source side. As a result, pressurized air is supplied to the suction holes on the lower side of the sample, and the sample is forcibly removed from the suction plate 1.

Note that the number of suction holes and opening/closing solenoid valves is not limited to the illustrated embodiment. When a large number of suction holes are provided, a plurality of adjacent suction holes may be connected to one opening/closing solenoid valve as one system. Instead of suction holes, multiple suction holes may be divided into systems according to the dimensions of the sample by facing outward from the center of the sample mounting part of the suction plate, and one on-off solenoid valve may be communicated with each system. Alternatively, a suction cup or the like protruding from a groove or a suction plate may be used. The vacuum suction port includes various means such as holes, grooves, and suction cups for sucking the sample by vacuum action. The sample shape can be either rectangular or round. Air-operated valves may be used in place of the opening/closing solenoid valve and the switching solenoid valve. One system near the center of the sample loading section may be directly connected to the switching solenoid valve without passing through the opening/closing solenoid valve. Even if an abnormality occurs in the solenoid valve, accidents such as the sample falling off the suction plate and being damaged can be prevented.

Alternatively, two switching solenoid valves may be used, one connected to a pneumatic source and the other connected to a vacuum source. This allows three types of actions to be performed: adsorption action (vacuum source connection, pneumatic source cutoff), adsorption release (vacuum source cutoff, air pressure source cutoff), and forced separation action (vacuum source cutoff, pneumatic source connection) be able to.

[Brief explanation of drawings]

FIG. 1 is a configuration diagram of a vacuum suction device according to the present invention. 1: Adsorption plate 2a-2e: Suction hole 38~3e: Open/close solenoid valve 4: Switching solenoid valve 5: Control unit. Figure 1

Claims (1)

[Scope of Claims] 1. A suction plate having a plurality of vacuum suction ports, a plurality of on-off valve means communicating with each of the vacuum suction ports, a switching valve means commonly communicating with each on-off valve means, and the switching valve means. A vacuum suction device comprising: a vacuum source communicating with the valve means; and a control section for controlling the operation of each of the on-off valve means and the switching valve means. 2. The vacuum adsorption device according to claim 1, wherein the on-off valve means and the switching valve means are each electromagnetic valves. 3. The vacuum adsorption device according to claim 1, wherein the on-off valve means and the switching valve means are each air-operated valves. 4. The plurality of vacuum suction ports are divided into systems in stages from the center of the suction plate according to the size of the sample to be adsorbed, and each system is connected to one on-off valve means. A vacuum adsorption device according to any one of claims 1 to 3. 5. Any one of claims 1 to 4, wherein the switching valve means comprises one solenoid valve, and the solenoid valve communicates with the vacuum source and a pressurized air source. 2. The vacuum suction device according to item 1. 6. The switching valve means comprises two electromagnetic valves, one of which communicates with a vacuum source and the other with a pressurized air source. The vacuum adsorption device according to item 1. 7. The control section operates to open the on-off valve means corresponding to the necessary vacuum suction port according to the size of the sample to be adsorbed, and to switch between and apply vacuum pressure and positive pressure via the switching valve means. The vacuum suction device according to any one of claims 1 to 6, characterized in that the vacuum adsorption device is controlled.