JPS6220865A - 蒸発方法 - Google Patents
蒸発方法Info
- Publication number
- JPS6220865A JPS6220865A JP16004885A JP16004885A JPS6220865A JP S6220865 A JPS6220865 A JP S6220865A JP 16004885 A JP16004885 A JP 16004885A JP 16004885 A JP16004885 A JP 16004885A JP S6220865 A JPS6220865 A JP S6220865A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- coating material
- substance
- coating
- vapor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 47
- 230000008020 evaporation Effects 0.000 claims abstract description 35
- 239000000956 alloy Substances 0.000 claims abstract description 8
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 8
- 239000000126 substance Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 abstract description 36
- 238000000576 coating method Methods 0.000 abstract description 31
- 239000011248 coating agent Substances 0.000 abstract description 28
- 238000010438 heat treatment Methods 0.000 abstract description 8
- 230000008022 sublimation Effects 0.000 abstract description 8
- 238000000859 sublimation Methods 0.000 abstract description 8
- 239000000654 additive Substances 0.000 abstract description 6
- 230000000996 additive effect Effects 0.000 abstract description 6
- 239000002245 particle Substances 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 229910052715 tantalum Inorganic materials 0.000 abstract description 3
- 229910052804 chromium Inorganic materials 0.000 abstract description 2
- 230000001747 exhibiting effect Effects 0.000 abstract description 2
- 229910052721 tungsten Inorganic materials 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 description 6
- 239000007790 solid phase Substances 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000005496 eutectics Effects 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000005422 blasting Methods 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010436 fluorite Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16004885A JPS6220865A (ja) | 1985-07-22 | 1985-07-22 | 蒸発方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16004885A JPS6220865A (ja) | 1985-07-22 | 1985-07-22 | 蒸発方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6220865A true JPS6220865A (ja) | 1987-01-29 |
| JPH0580550B2 JPH0580550B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-09 |
Family
ID=15706791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16004885A Granted JPS6220865A (ja) | 1985-07-22 | 1985-07-22 | 蒸発方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6220865A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0969115A1 (en) * | 1996-05-17 | 2000-01-05 | United Technologies Corporation | Method of vacuum vaporization of metals |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3400873A1 (en) | 2013-06-28 | 2018-11-14 | Murata Manufacturing Co., Ltd. | Biological state estimating apparatus |
-
1985
- 1985-07-22 JP JP16004885A patent/JPS6220865A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0969115A1 (en) * | 1996-05-17 | 2000-01-05 | United Technologies Corporation | Method of vacuum vaporization of metals |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0580550B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-09 |
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