JPS62204324U - - Google Patents
Info
- Publication number
- JPS62204324U JPS62204324U JP1986091838U JP9183886U JPS62204324U JP S62204324 U JPS62204324 U JP S62204324U JP 1986091838 U JP1986091838 U JP 1986091838U JP 9183886 U JP9183886 U JP 9183886U JP S62204324 U JPS62204324 U JP S62204324U
- Authority
- JP
- Japan
- Prior art keywords
- patterns
- photomask
- contact exposure
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986091838U JPS62204324U (de) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986091838U JPS62204324U (de) | 1986-06-18 | 1986-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62204324U true JPS62204324U (de) | 1987-12-26 |
Family
ID=30952985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986091838U Pending JPS62204324U (de) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62204324U (de) |
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1986
- 1986-06-18 JP JP1986091838U patent/JPS62204324U/ja active Pending