JPS6445841U - - Google Patents
Info
- Publication number
- JPS6445841U JPS6445841U JP1987139388U JP13938887U JPS6445841U JP S6445841 U JPS6445841 U JP S6445841U JP 1987139388 U JP1987139388 U JP 1987139388U JP 13938887 U JP13938887 U JP 13938887U JP S6445841 U JPS6445841 U JP S6445841U
- Authority
- JP
- Japan
- Prior art keywords
- mask pattern
- pattern surface
- photomask
- hole penetrating
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000149 penetrating effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987139388U JPS6445841U (de) | 1987-09-14 | 1987-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987139388U JPS6445841U (de) | 1987-09-14 | 1987-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445841U true JPS6445841U (de) | 1989-03-20 |
Family
ID=31402599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987139388U Pending JPS6445841U (de) | 1987-09-14 | 1987-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445841U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003110389A (ja) * | 2001-09-28 | 2003-04-11 | Kinseki Ltd | フォトマスク |
-
1987
- 1987-09-14 JP JP1987139388U patent/JPS6445841U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003110389A (ja) * | 2001-09-28 | 2003-04-11 | Kinseki Ltd | フォトマスク |