JPS62204322U - - Google Patents

Info

Publication number
JPS62204322U
JPS62204322U JP9307186U JP9307186U JPS62204322U JP S62204322 U JPS62204322 U JP S62204322U JP 9307186 U JP9307186 U JP 9307186U JP 9307186 U JP9307186 U JP 9307186U JP S62204322 U JPS62204322 U JP S62204322U
Authority
JP
Japan
Prior art keywords
substrate
back plate
fixing
semiconductor
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9307186U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9307186U priority Critical patent/JPS62204322U/ja
Publication of JPS62204322U publication Critical patent/JPS62204322U/ja
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ａは本考案の実施例における基板固定用
裏板の平面図、同ｂはその使用状態における断面
図、第２図は同裏板を用いてＣＶＤ装置内に基板
を設置した状態を示す断面略図、第３図はマスク
の形状を示す斜視図、第４図は基板に非晶質膜が
堆積された状態を示す斜視図、第５図は従来例の
治具を用いて基板をＣＶＤ装置に設置した状態を
示す断面略図である。 １……基板、２……マスク、３……裏板、４…
…トレイ、５……突起部、６……磁石。 Figure 1a is a plan view of a back plate for fixing a substrate in an embodiment of the present invention, Figure 1b is a sectional view of the back plate in its usage state, and Figure 2 shows a state in which a substrate is installed in a CVD apparatus using the same back plate. 3 is a perspective view showing the shape of the mask, FIG. 4 is a perspective view showing the state in which an amorphous film is deposited on the substrate, and FIG. It is a cross-sectional schematic diagram showing a state installed in a CVD apparatus. 1...Substrate, 2...Mask, 3...Back plate, 4...
...Tray, 5...Protrusion, 6...Magnet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体製造装置中で基板に半導体薄膜を堆積さ
せる際に用いる基板固定用裏板であつて、この裏
板には基板とこれに沿わせたマスクを、磁性金属
板からなる支持トレイに密着固定するためトレイ
に対応した複数の突起部を設けるとともに各突起
部に磁石を埋設したことを特徴とする半導体素子
の基板固定用裏板。 A back plate for fixing a substrate used when depositing a semiconductor thin film on a substrate in semiconductor manufacturing equipment, on which a substrate and a mask along the back plate are closely fixed to a support tray made of a magnetic metal plate. 1. A back plate for fixing a substrate of a semiconductor element, characterized in that a plurality of protrusions corresponding to a tray are provided and a magnet is embedded in each protrusion.
JP9307186U 1986-06-18 1986-06-18 Pending JPS62204322U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9307186U JPS62204322U (en) 1986-06-18 1986-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9307186U JPS62204322U (en) 1986-06-18 1986-06-18

Publications (1)

Publication Number Publication Date
JPS62204322U true JPS62204322U (en) 1987-12-26

Family

ID=30955337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9307186U Pending JPS62204322U (en) 1986-06-18 1986-06-18

Country Status (1)

Country Link
JP (1) JPS62204322U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003324075A (en) * 2002-04-25 2003-11-14 Applied Materials Inc Shadow frame with cross beam for semiconductor equipment
JP2008506993A (en) * 2004-07-16 2008-03-06 アプライド　マテリアルズ　インコーポレイテッド Shadow frame with mask panel
JP2020136283A (en) * 2019-02-12 2020-08-31 株式会社カネカ Mask tray, and, manufacturing method of solar battery cell

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003324075A (en) * 2002-04-25 2003-11-14 Applied Materials Inc Shadow frame with cross beam for semiconductor equipment
JP4596747B2 (en) * 2002-04-25 2010-12-15 アプライド マテリアルズ インコーポレイテッド Shadow frame with crosspieces for semiconductor devices
JP2008506993A (en) * 2004-07-16 2008-03-06 アプライド　マテリアルズ　インコーポレイテッド Shadow frame with mask panel
JP2020136283A (en) * 2019-02-12 2020-08-31 株式会社カネカ Mask tray, and, manufacturing method of solar battery cell

Similar Documents

Publication Publication Date Title
JPS62204322U (en)
JPH03106745U (en)
JPH0328830U (en)
JPS6355166U (en)
JPS5888647U (en) Grid plate positioning mechanism in corona charging device
JPH0414629U (en)
JPH01152500U (en)
JPS637984U (en)
JPH03109351U (en)
JPS6138071U (en) matte underlay
JPS6326802U (en)
JPH0371637U (en)
JPH0288233U (en)
JPS63202672U (en)
JPS6416698U (en)
JPH0386116U (en)
JPS63125723U (en)
JPH0375564U (en)
JPS60191044U (en) diazo copying material
JPS6074662U (en) backrest equipment
JPH0355517U (en)
JPH0469428U (en)
JPS61196299U (en)
JPS62151747U (en)
JPH01129256U (en)