JPS62203049A - Method for measuring article to be measured with x-rays in non-destructive state - Google Patents

Abstract

PURPOSE:To enable on-line measurement, by a method where white X-rays from an X-ray source are passed through two or more kinds of filters and X-ray beam after transmission is allowed to irradiate a measuring objective area and the intensity of transmitted X-rays is measured by an X-ray detector. CONSTITUTION:White X-rays X11, X21 emitted in a pulse like form from an X-ray source 1 are passed through filters 2L, 2H to come to pseudo monochromatic X-rays X12, X2 which is turn pass through a collimator 3 to irradiate the measuring objective area (one cross-section) o an article 10 to be measured. Each X-ray beam transmitted through the article 10 to be measured, that is, each of transmitted X-rays X13, X23 is collimated by a collimator 4 and the quantities of said X-rays are measured through X-ray detectors 5L, 5H. In this case, because X-ray beam irradiates from one direction toward the article 10 to be measured, it is convenient to measure the axially symmetric rotating article 10 to be measured and the article 10 to be measured can be measured by an on-line system and it is unnecessary to move the X-ray source 1 and the X-ray detectors 5L,5H.

Description

DETAILED DESCRIPTION OF THE INVENTION r Industrial Field of Application 1 The present invention relates to a method for analyzing and measuring the composition, thickness, etc. of an object to be measured by non-destructive measurement means using X-rays.

``When measuring the composition concentration, composition distribution, thickness, etc. of an impenetrable object consisting of two constituent elements non-destructively using X-ray irradiation, two monochromatic X-rays are used to measure the inside of the object to be measured. X passed through
It is necessary to measure the dose.

In this case, it is common to convert the white X@ emitted from the X-ray source into monochromatic X-rays, but LiF, G
It is effective to use a single crystal such as e and diffract a predetermined X@ under Laue conditions and Bragg conditions.

On the other hand, there is also a method of measuring white X-rays by dividing them into different energies using a semiconductor detector, which is equivalent to using a single crystal.

``Problems to be Solved by the Invention j'' In the former measurement method described above, a single crystal is set at an angle with high precision on the order of seconds, and a single X-ray beam is diffracted by the single crystal.

In this case, the X-rays from the X-ray source can be three-dimensionalized at an angle of 30°, and if this is appropriately shaped into a fine beam, a cross section of the object to be measured can be scanned at high speed, and high-speed measurement is possible.
In general, methods using single crystals require a large space for precision equipment, so it is not possible to diffract multiple Xli beams at the same time, and as a result, the object to be measured must be scanned with an X-ray beam of Otherwise, the measurement time will be longer.

On the other hand, in the latter measurement method mentioned above, the semiconductor detector is expensive and the detector itself does not have long-term stability.
This is the bottleneck for practical use.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention aims to provide a method that allows non-destructive measurement of an object to be measured easily and at high speed.

Means for Solving Problems J In order to achieve the intended purpose, the non-destructive measurement method of the object to be measured according to the present invention passes white X-rays from xmi;t through two or more types of filters, The method is characterized in that the X-ray beam that has passed through these filters is irradiated over the measurement target area of the object to be measured, and the intensity of the X-rays that have passed through the object is measured by an X-ray detector.

“Implementation Example J Embodiments of the present invention will be described below with reference to the drawings.

In FIG. 1, for example, when analyzing the composition of a rotating opaque object to be measured consisting of two compositions, white X-rays II+, ! 21 is a pseudo-monochromatic X! by passing through filters 2L and 2H. at+z, x27, and these pseudo-monochromatic X-rays i+2. ! 22 passes through the collimator 3, it is irradiated onto the measurement target region (-cross section) of the object to be measured 10.

Each X-ray beam after passing through the object to be measured 10, that is, each transmitted XklAK+3. ! 23 is focused by the collimator 4, and the amount of these X-rays is measured via the X-ray detectors 5[, 5H.

The thus measured X-ray ffi (n-constant data) is convolved with a filter function, for example, and superimposed at each rotation angle to obtain the composition distribution of one cross section of the object to be measured lO. is an X-ray detector 5L,
This is performed based on data stored in a computer (not shown) connected to 511.

The data stored in the computer is precisely collected by driving the object to be measured at regular intervals and at regular time intervals and performing constant Xi scanning.

In addition, when measuring the object to be measured I0 consisting of two components in the above, there are two cases where one cross section of the object to be measured I0 is divided into two and irradiated with X-rays as shown in Fig. 3. Divide the object to be measured (1G) into upper and lower parts x! There are cases where it is irradiated.

As the X-ray source, for example, a white x3 source targeting tungsten is used, and its maximum voltage is 150 kV.
, the current is about 40 mA.

One filter 2 is one that transmits energy of 55 to 134 keV, and the other filter 2 is
) 1 is one that transmits energy of 70 to 95 keV.

As the multi-type X-ray detector 5[, 511, for example, a scintillation tube is used.

In the method of the present invention described above, since the X-ray beam is irradiated from one direction toward the object to be measured 1O1, the axially symmetrical rotating object 1O1, for example, 5i02-
It is convenient for measuring the Ge02-based porous glass base material, and the object to be measured 10 can be measured online.
X-ray source 1. There is no need to move the X-ray detector 5, 511, etc.

If a high-intensity X-ray source is used at this time,
The measurement of the porous glass base material can be made faster, and as shown in Fig. 2, the X-ray detector 5 [
, 5) in parallel, the online measurement described above can be performed more rationally.

When measuring a cross section of the object to be measured 10 that is not rotationally symmetrical,
What is necessary is to irradiate the object to be measured IO with X-rays from multiple directions and superimpose the measurement states at that time.

Effects of the Invention 1 As explained above, when using the method of the present invention, white X-rays from an X-ray source are passed through two or more types of filters, and the X-ray beam after passing through these filters is directed toward the object to be measured. The x6 source,
There is no need to move the line detector or the like, the optical system is easy to handle, desired measurements can be made quickly and in a short time, and the object to be measured can be measured online.

[Brief explanation of drawings]

Figure 1 is a front view schematically showing the measurement principle of the method of the present invention, Figure 2
3 are a top view and a front view schematically showing various specific examples of the same 1-. 1...X-ray source 21, 211...Fist filter 3--Excellent...Collimator 4 ・Enjoyable fist...Collimator 51, 511...Multi X-ray Detector lO...
...Object to be measured! 11. 21"" white X-ray! +2, ! 22...Pseudo monochromatic X-rays! +3
, ! 23... Life-transmitting X-ray agent Patent attorney Yoshio Saito Figure 1 Figure 2 Figure 3 wi

Claims (1)

[Claims] White X-rays from an X-ray source are passed through two or more types of filters, and the X-ray beam that has passed through these filters is irradiated over the measurement target area of the object to be measured, and the intensity of the X-rays that have passed through the object is measured. A non-destructive method for measuring an object using X-rays, the method comprising measuring with an X-ray detector.