JPS62201927U - - Google Patents

Info

Publication number
JPS62201927U
JPS62201927U JP9028086U JP9028086U JPS62201927U JP S62201927 U JPS62201927 U JP S62201927U JP 9028086 U JP9028086 U JP 9028086U JP 9028086 U JP9028086 U JP 9028086U JP S62201927 U JPS62201927 U JP S62201927U
Authority
JP
Japan
Prior art keywords
airtight chamber
susceptor
vapor phase
substrate
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9028086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9028086U priority Critical patent/JPS62201927U/ja
Publication of JPS62201927U publication Critical patent/JPS62201927U/ja
Pending legal-status Critical Current

Links

JP9028086U 1986-06-13 1986-06-13 Pending JPS62201927U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9028086U JPS62201927U (US20020051482A1-20020502-M00012.png) 1986-06-13 1986-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9028086U JPS62201927U (US20020051482A1-20020502-M00012.png) 1986-06-13 1986-06-13

Publications (1)

Publication Number Publication Date
JPS62201927U true JPS62201927U (US20020051482A1-20020502-M00012.png) 1987-12-23

Family

ID=30949994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9028086U Pending JPS62201927U (US20020051482A1-20020502-M00012.png) 1986-06-13 1986-06-13

Country Status (1)

Country Link
JP (1) JPS62201927U (US20020051482A1-20020502-M00012.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220433A (ja) * 1988-02-29 1989-09-04 Nec Corp 気相成長装置
JPH038426U (US20020051482A1-20020502-M00012.png) * 1989-06-09 1991-01-28
JPH0410528A (ja) * 1990-04-27 1992-01-14 Shin Etsu Handotai Co Ltd 気相成長装置および気相成長方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220433A (ja) * 1988-02-29 1989-09-04 Nec Corp 気相成長装置
JPH038426U (US20020051482A1-20020502-M00012.png) * 1989-06-09 1991-01-28
JPH0410528A (ja) * 1990-04-27 1992-01-14 Shin Etsu Handotai Co Ltd 気相成長装置および気相成長方法

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