JPS62199664U - - Google Patents
Info
- Publication number
- JPS62199664U JPS62199664U JP8913786U JP8913786U JPS62199664U JP S62199664 U JPS62199664 U JP S62199664U JP 8913786 U JP8913786 U JP 8913786U JP 8913786 U JP8913786 U JP 8913786U JP S62199664 U JPS62199664 U JP S62199664U
- Authority
- JP
- Japan
- Prior art keywords
- light
- light beam
- inspected
- lens system
- condensing lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8913786U JPS62199664U (ko) | 1986-06-10 | 1986-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8913786U JPS62199664U (ko) | 1986-06-10 | 1986-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62199664U true JPS62199664U (ko) | 1987-12-19 |
Family
ID=30947848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8913786U Pending JPS62199664U (ko) | 1986-06-10 | 1986-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62199664U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007292770A (ja) * | 2006-04-26 | 2007-11-08 | Siemens Ag | 平滑面における点状、線状又は面状の欠陥の検出のための光センサ |
-
1986
- 1986-06-10 JP JP8913786U patent/JPS62199664U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007292770A (ja) * | 2006-04-26 | 2007-11-08 | Siemens Ag | 平滑面における点状、線状又は面状の欠陥の検出のための光センサ |
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