JPS6219856A - Positioning method for substrate where pattern is to be formed - Google Patents

Abstract

PURPOSE:To perform accurate positioning on the basis of a positioning mark which is viewed through a cut part formed by cutting part of a circle and a partial circle part by shaping an alignment key in a partial concentric circle consisting of the cut part and partial circle part. CONSTITUTION:A glaze layer 2 is formed on a pattern formation substrate 1 by screen printing and a circular glaze 3 for alignment is formed simultaneously with the formation of the layer 2. This glaze 3 is formed nearby the end part of two corresponding sides in the extension direction of the layer 2. The alignment key 5 corresponding to the position of the glaze 3 is formed at the end part of two sides of a photomask made of transparent glass. Further, the desired pattern of the substrate 1 is formed in the photomask 4. The key 5 consists of the partial circle part 5a and cut part 5b and the circular glaze 3 is nearly as large as the key 5; when the both are put one over the other, the glaze 3 can be seen through the cut part 5b, so that the glaze 3 and key 5 are positioned accurately.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a method for aligning a substrate on which a pattern is formed, such as a thermal print head.

(B) Prior Art In the manufacturing process of a thermal print head, it is necessary to align the print head substrate with a mask in order to properly form an electrode pattern or a heating resistor pattern on a glaze layer. Conventionally, this alignment was performed in the orthogonal direction of the glaze layer using an alignment key provided on the mask and the pitch of the glaze layer, and in the extending direction of the glaze layer, it was performed using a pin fixed to the alignment device. This was done by touching the edge of the board to multiple pins. However, due to substrate dimensional accuracy errors, there is a certain limit to improving alignment accuracy in the extension direction.

Therefore, in order to solve this problem and further improve alignment accuracy, the applicant of this application formed a circular alignment glaze near the ends of two opposing sides of the substrate at the same time as the glaze layer, and then , has developed and already filed an application for a method of aligning with the substrate using a mask equipped with concentric alignment keys provided corresponding to the alignment glaze.

(c) Problems to be Solved by the Invention Since the glaze layer is a glass layer, the shape and center of the circular alignment glaze layer formed on the substrate are difficult to discern. Moreover, since the alignment key 15 according to the prior application is formed in concentric circles as shown in FIG. 2(a), as shown in FIG. 2(b),
The pattern of the glaze layer 13 is almost the alignment key 15
If it is equal to the concentric circles of
As shown in the figure, the pattern of the glaze layer 13 is hidden by the concentric circles of the alignment key 15, making it very difficult to see.
There was a problem that alignment took time.

In view of the above, an object of the present invention is to provide a method for positioning a substrate on which a pattern is to be formed, in which positioning can be performed quickly and accurately.

(d) Means and Effects for Solving Problems The method for aligning a pattern-formed substrate of the present invention is characterized in that circular alignment marks (alignment glaze layers) are placed near the ends of two opposing sides of a pattern-formed substrate. ), and an alignment key corresponding to the alignment mark is provided on the mask, and alignment is performed by matching the alignment mark with the alignment key, in which the shape of the alignment key is , a partial concentric circle is formed by cutting out a part of a circle and the inside of the part, and alignment is performed using the positioning mark visually observed from the cut out part and the inside of the part.

(E) Examples The present invention will be explained in more detail with reference to Examples below.

FIG. 3 is an explanatory diagram showing a state in which a glaze layer and a glaze for alignment are formed on a substrate, and FIG. 4 is an explanatory diagram showing an alignment key formed on a mask.

In FIG. 3, a glaze N2 is formed on a substrate 1 made of ceramic or the like by screen printing and fired, and at the same time as the glaze N2 is formed, a circular alignment glaze 3 is formed. This alignment glaze 3 is formed near the ends of two opposing sides corresponding to the extending direction of the glaze N2.

In FIG. 4, a photomask 4 is made of ultra-transparent glass, and alignment keys 5 are formed at the ends of two sides of the photomask 4, corresponding to the positions of the alignment glaze 3. Although not shown, the photomask 4 includes a mask pattern for forming a desired pattern on the substrate 1.

This embodiment is most characterized by the shape of the alignment key 5. In other words, the alignment key 5 is
As shown in FIG. 1, the concentric circles are divided into 456 parts and are made up of alternating interior parts 5a and cutout parts 5b.

Next, a method for aligning the substrate 1 and the photomask 4 will be explained.

First, the substrate 1 on which the glaze layer 2 and alignment glaze 3 are formed is set in a bin alignment device.

Next, the photomask 4 is set in relation to the substrate 1.

Next, the substrate 1 is moved by a bin alignment device,
The alignment glaze 3 and the alignment key 5 are compared and matched to perform positioning.

In this case, since the alignment glaze 3 is circular, the alignment glaze 3 provided on each of the two opposing sides of the substrate 1 aligns the glaze layer 2 in the extending direction and in the orthogonal direction.

In addition, the alignment key 5 is connected to the inner part 5a and the cutout part 5b.
Even if the size of the circular alignment glaze 3 is approximately the same as the size of the alignment key 5, as shown in FIG. When superimposed, the alignment glaze 3 can be visually observed through the cutout 5b, and alignment can be performed accurately by matching the visually observed alignment glaze 3 with the inner portion 5a of the alignment key 5. Can be done.

In the above embodiment, the cutout portions 5b of the alignment key are provided in 45° increments, but the angle of the cutout portions 6b and the ratio to the partially concentric interior 5a may be selected to appropriate values. Bye.

Furthermore, although the above embodiments have been described using a thermal print head as an example, the present invention can be widely applied to alignment when forming patterns on other pattern-forming substrates.

(F) Effects of the Invention According to the present invention, the shape of the alignment key is made into a partially concentric circle consisting of a cutout part which is a part of a circle cut out, and the inside of the part, and the circular alignment mark and the part that can be visually observed from the cutout part. Since the alignment is performed internally, even if the alignment key and the alignment mark completely overlap, the alignment mark can be visually checked from the resection area and alignment can be performed accurately, and the alignment time can be shortened. can be significantly shortened.

[Brief explanation of drawings]

FIG. 1 is a diagram for explaining the alignment of the present invention, and FIG. 1(a) shows the alignment key.
l shows the alignment glaze pattern in Figure 1 (C
) is a diagram showing the state in which the alignment key and the alignment glaze are superimposed, FIG. 2 is a diagram for explaining conventional alignment, and FIG. tel is the alignment glaze pattern, Fig. 2 (1c) is a diagram showing the alignment key and alignment glaze overlapped, and Fig. 3
The figure is an explanatory diagram showing a state in which a glaze layer and a glaze for alignment are formed on a substrate, and FIG. 4 is an explanatory diagram showing an alignment key formed on a mask. Engineering: Substrate, 2: Glaze layer, 3: Alignment glaze, 4: Photomask, 5: Alignment key, 5a:
Part inside, 5b: resection part. Patent applicant ROHM Co., Ltd. agent
Patent Attorney Shigeru Nakamura Figure 1 Figure 2 CC) <b) <a) <a>

Claims (1)

[Claims] (1) Circular alignment marks are formed near the ends of two opposing sides of the pattern formation substrate, and an alignment key corresponding to the alignment mark is provided on the mask, and the alignment key is attached to the alignment key corresponding to the alignment mark. In a method for aligning a patterned substrate in which alignment is performed by aligning alignment marks, the shape of the alignment key is a partially concentric circle consisting of a cutout section and a partial circle section, and A method for aligning a substrate on which a pattern is formed, characterized in that alignment is performed using the alignment mark visually observed from the part and the inside of the part.