JPS62198268U - - Google Patents

Info

Publication number
JPS62198268U
JPS62198268U JP8682286U JP8682286U JPS62198268U JP S62198268 U JPS62198268 U JP S62198268U JP 8682286 U JP8682286 U JP 8682286U JP 8682286 U JP8682286 U JP 8682286U JP S62198268 U JPS62198268 U JP S62198268U
Authority
JP
Japan
Prior art keywords
vacuum chamber
deposited
evaporated
evaporation
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8682286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519328Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986086822U priority Critical patent/JPH0519328Y2/ja
Publication of JPS62198268U publication Critical patent/JPS62198268U/ja
Application granted granted Critical
Publication of JPH0519328Y2 publication Critical patent/JPH0519328Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1986086822U 1986-06-06 1986-06-06 Expired - Lifetime JPH0519328Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986086822U JPH0519328Y2 (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986086822U JPH0519328Y2 (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Publications (2)

Publication Number Publication Date
JPS62198268U true JPS62198268U (enrdf_load_stackoverflow) 1987-12-17
JPH0519328Y2 JPH0519328Y2 (enrdf_load_stackoverflow) 1993-05-21

Family

ID=30943480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986086822U Expired - Lifetime JPH0519328Y2 (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Country Status (1)

Country Link
JP (1) JPH0519328Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58100675A (ja) * 1981-12-11 1983-06-15 Mitsubishi Heavy Ind Ltd 連続蒸着方法及びその装置
JPS6134173A (ja) * 1984-07-24 1986-02-18 Agency Of Ind Science & Technol 高硬度窒化ホウ素膜の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58100675A (ja) * 1981-12-11 1983-06-15 Mitsubishi Heavy Ind Ltd 連続蒸着方法及びその装置
JPS6134173A (ja) * 1984-07-24 1986-02-18 Agency Of Ind Science & Technol 高硬度窒化ホウ素膜の製造方法

Also Published As

Publication number Publication date
JPH0519328Y2 (enrdf_load_stackoverflow) 1993-05-21

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