JPS62197794U - - Google Patents

Info

Publication number
JPS62197794U
JPS62197794U JP8686686U JP8686686U JPS62197794U JP S62197794 U JPS62197794 U JP S62197794U JP 8686686 U JP8686686 U JP 8686686U JP 8686686 U JP8686686 U JP 8686686U JP S62197794 U JPS62197794 U JP S62197794U
Authority
JP
Japan
Prior art keywords
rotating body
bearing
turbo
electric motor
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8686686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8686686U priority Critical patent/JPS62197794U/ja
Publication of JPS62197794U publication Critical patent/JPS62197794U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP8686686U 1986-06-06 1986-06-06 Pending JPS62197794U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8686686U JPS62197794U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8686686U JPS62197794U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Publications (1)

Publication Number Publication Date
JPS62197794U true JPS62197794U (enrdf_load_stackoverflow) 1987-12-16

Family

ID=30943568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8686686U Pending JPS62197794U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Country Status (1)

Country Link
JP (1) JPS62197794U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01267392A (ja) * 1988-04-15 1989-10-25 Hitachi Ltd ターボ真空ポンプ
JP2006063881A (ja) * 2004-08-26 2006-03-09 Shimadzu Corp 高速回転機器
JP2021092150A (ja) * 2019-12-06 2021-06-17 株式会社島津製作所 真空ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01267392A (ja) * 1988-04-15 1989-10-25 Hitachi Ltd ターボ真空ポンプ
JP2006063881A (ja) * 2004-08-26 2006-03-09 Shimadzu Corp 高速回転機器
JP2021092150A (ja) * 2019-12-06 2021-06-17 株式会社島津製作所 真空ポンプ

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