JPS62197793U - - Google Patents
Info
- Publication number
- JPS62197793U JPS62197793U JP8668186U JP8668186U JPS62197793U JP S62197793 U JPS62197793 U JP S62197793U JP 8668186 U JP8668186 U JP 8668186U JP 8668186 U JP8668186 U JP 8668186U JP S62197793 U JPS62197793 U JP S62197793U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- molecular pump
- pump device
- rotating body
- turbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8668186U JPS62197793U (OSRAM) | 1986-06-05 | 1986-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8668186U JPS62197793U (OSRAM) | 1986-06-05 | 1986-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197793U true JPS62197793U (OSRAM) | 1987-12-16 |
Family
ID=30943213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8668186U Pending JPS62197793U (OSRAM) | 1986-06-05 | 1986-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197793U (OSRAM) |
-
1986
- 1986-06-05 JP JP8668186U patent/JPS62197793U/ja active Pending