JPS6219759U - - Google Patents
Info
- Publication number
- JPS6219759U JPS6219759U JP11116685U JP11116685U JPS6219759U JP S6219759 U JPS6219759 U JP S6219759U JP 11116685 U JP11116685 U JP 11116685U JP 11116685 U JP11116685 U JP 11116685U JP S6219759 U JPS6219759 U JP S6219759U
- Authority
- JP
- Japan
- Prior art keywords
- adjustment resistor
- offset adjustment
- resistor
- end connected
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
図面は、この考案の半導体圧力センサの１実施
例を示し、第１図は平面図、第２図は結線図であ
る。 １……半導体基板、３ａ〜３ｄ……ピエゾ抵抗
、５ａ．５ｂ……内蔵抵抗、８ａ，８ｂ……ワイ
ヤ。
例を示し、第１図は平面図、第２図は結線図であ
る。 １……半導体基板、３ａ〜３ｄ……ピエゾ抵抗
、５ａ．５ｂ……内蔵抵抗、８ａ，８ｂ……ワイ
ヤ。
Claims (1)
- 半導体基板上に形成されたブリツジ回路を構成
する複数個のピエゾ抵抗と、前記基板上に形成さ
れたオフセツト調整用抵抗と、一端が前記オフセ
ツト調整用抵抗の端部に接続され他端が前記オフ
セツト調整用抵抗の途中に接続されて当接抵抗の
抵抗値を調製するワイヤとを備えた半導体圧力セ
ンサ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116685U JPS6219759U (ja) | 1985-07-20 | 1985-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116685U JPS6219759U (ja) | 1985-07-20 | 1985-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6219759U true JPS6219759U (ja) | 1987-02-05 |
Family
ID=30990835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11116685U Pending JPS6219759U (ja) | 1985-07-20 | 1985-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6219759U (ja) |
-
1985
- 1985-07-20 JP JP11116685U patent/JPS6219759U/ja active Pending