JPS6219731U - - Google Patents
Info
- Publication number
- JPS6219731U JPS6219731U JP11116385U JP11116385U JPS6219731U JP S6219731 U JPS6219731 U JP S6219731U JP 11116385 U JP11116385 U JP 11116385U JP 11116385 U JP11116385 U JP 11116385U JP S6219731 U JPS6219731 U JP S6219731U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- holding
- heating
- thin film
- film growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116385U JPS6219731U (ar) | 1985-07-20 | 1985-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116385U JPS6219731U (ar) | 1985-07-20 | 1985-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6219731U true JPS6219731U (ar) | 1987-02-05 |
Family
ID=30990829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11116385U Pending JPS6219731U (ar) | 1985-07-20 | 1985-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6219731U (ar) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936551A (ar) * | 1972-06-29 | 1974-04-04 | ||
| JPS5713795U (ar) * | 1980-06-30 | 1982-01-23 |
-
1985
- 1985-07-20 JP JP11116385U patent/JPS6219731U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936551A (ar) * | 1972-06-29 | 1974-04-04 | ||
| JPS5713795U (ar) * | 1980-06-30 | 1982-01-23 |