JPS62194760U - - Google Patents
Info
- Publication number
- JPS62194760U JPS62194760U JP8516586U JP8516586U JPS62194760U JP S62194760 U JPS62194760 U JP S62194760U JP 8516586 U JP8516586 U JP 8516586U JP 8516586 U JP8516586 U JP 8516586U JP S62194760 U JPS62194760 U JP S62194760U
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- exhaust
- reaction tube
- main heat
- side valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009413 insulation Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8516586U JPH0441170Y2 (es) | 1986-06-03 | 1986-06-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8516586U JPH0441170Y2 (es) | 1986-06-03 | 1986-06-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62194760U true JPS62194760U (es) | 1987-12-11 |
| JPH0441170Y2 JPH0441170Y2 (es) | 1992-09-28 |
Family
ID=30940321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8516586U Expired JPH0441170Y2 (es) | 1986-06-03 | 1986-06-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441170Y2 (es) |
-
1986
- 1986-06-03 JP JP8516586U patent/JPH0441170Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441170Y2 (es) | 1992-09-28 |
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