JPS62192645U - - Google Patents
Info
- Publication number
- JPS62192645U JPS62192645U JP8147886U JP8147886U JPS62192645U JP S62192645 U JPS62192645 U JP S62192645U JP 8147886 U JP8147886 U JP 8147886U JP 8147886 U JP8147886 U JP 8147886U JP S62192645 U JPS62192645 U JP S62192645U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- rollers
- wafer
- oriented flat
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Description
第１図、第２図は本考案のウエハ把持ハンドの
一実施例の概念図である。第１図はウエハ把持前
のハンドとウエハ、第２図はウエハ把持後のハン
ドとウエハの様子を示している。
１……ローラ対ａ、２……ローラ対ｂ、３……
直線案内機構、４……ウエハ、５……オリエンテ
ツド・フラツト（Ｏ．Ｆ．）。
1 and 2 are conceptual diagrams of an embodiment of the wafer gripping hand of the present invention. FIG. 1 shows the hand and the wafer before gripping the wafer, and FIG. 2 shows the hand and the wafer after gripping the wafer. 1... Roller pair a, 2... Roller pair b, 3...
Linear guide mechanism, 4... wafer, 5... oriented flat (O.F.).
Claims (1)
自由に回転できる第１のローラ対をシリコンウエ
ハのオリエンテツド・フラツト部の長さより短い
間隔でフラツト部端面に当るように配置し、前記
第１のローラ対と対向して配置され自由に回転で
きる第２のローラ対を相対的に移動させて、前記
オリエンテツド・フラツト部と反対側の円弧部端
面に当るようにし、前記第１のローラ対と第２の
ローラ対でウエハを把持することによりウエハの
オリエンテツド・フラツト部を一方のローラ対に
倣わせてオリエンテツド・フラツトの向きを揃え
ることを特徴とするロボツトのウエハ把持ハンド
。 In the hand that grips the silicon wafer,
A first pair of freely rotatable rollers is arranged so as to touch the end face of the flat part at an interval shorter than the length of the oriented flat part of the silicon wafer, and is arranged opposite to the first pair of rollers and can freely rotate. By relatively moving the second pair of rollers so that they come into contact with the end face of the circular arc portion on the opposite side to the oriented flat portion, and gripping the wafer with the first pair of rollers and the second pair of rollers. A wafer gripping hand for a robot characterized in that the oriented flat portion of the wafer follows one pair of rollers to align the orientation of the oriented flat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8147886U JPS62192645U (en) | 1986-05-28 | 1986-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8147886U JPS62192645U (en) | 1986-05-28 | 1986-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192645U true JPS62192645U (en) | 1987-12-08 |
Family
ID=30933254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8147886U Pending JPS62192645U (en) | 1986-05-28 | 1986-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192645U (en) |
-
1986
- 1986-05-28 JP JP8147886U patent/JPS62192645U/ja active Pending