JPS6219157U

JPS6219157U -

Info

Publication number: JPS6219157U
Application number: JP1985111177U
Authority: JP
Priority date: 1985-07-19
Filing date: 1985-07-19
Publication date: 1987-02-04

Description

[Brief explanation of drawings]

第１図は、本考案の研磨装置の一実施例を説明
する図、第２図は従来の研磨装置を説明する図、
第３図は従来の研磨圧力を軽減する研磨装置を説
明する図である。図において１は本体、２は研磨皿、３は研磨ホ
ルダ、４は被研磨物、５は下軸、６はベアリング
、７は上軸、８は連結棒、９はアーム、１０はバ
ランス棒、１１は支点、１２はバランサ、１３は
保持棒、１４はアーム、１５はおもり，１６は研
磨液タンク、１７は研磨液、１８は管、１９は横
棒、２０は柱、２１は支点をそれぞれ示す。 FIG. 1 is a diagram illustrating an embodiment of the polishing apparatus of the present invention, FIG. 2 is a diagram illustrating a conventional polishing apparatus,
FIG. 3 is a diagram illustrating a conventional polishing apparatus that reduces polishing pressure. In the figure, 1 is the main body, 2 is the polishing plate, 3 is the polishing holder, 4 is the object to be polished, 5 is the lower shaft, 6 is the bearing, 7 is the upper shaft, 8 is the connecting rod, 9 is the arm, 10 is the balance rod, 11 is a fulcrum, 12 is a balancer, 13 is a holding rod, 14 is an arm, 15 is a weight, 16 is a polishing liquid tank, 17 is a polishing liquid, 18 is a tube, 19 is a horizontal bar, 20 is a column, and 21 is a fulcrum. show.

Claims

[Scope of utility model registration request]

In a polishing device that polishes a workpiece adhered to a polishing holder facing a rotating polishing plate, the workpiece is rotated as a result of friction between the polishing plate and the workpiece. A mechanism that allows arbitrary driven rotation on a driven rotation shaft, a mechanism that holds an assembly consisting of the rotation shaft, a polishing holder, and an object to be polished in a vertically movable manner, and a mechanism that lifts the assembly upward on its central axis for polishing. A polishing device characterized by having a mechanism for reducing pressure.