JPS5936364Y2 - Pressure device in surface polishing machine - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an improvement of a pressure device in a surface polishing machine such as a mirror polishing machine.

Conventionally, polishing machines such as lapping machines and puff machines have been used to finish the surface of workpieces, and among them, mirror polishing machines have been used to polish the surface of precision workpieces such as thin plates.

By the way, in the above-mentioned various surface polishing machines, there are pressure devices that use the weight of the polishing head to press the polishing body or the like directly onto the surface of the workpiece through an abrasive such as abrasive grains or directly. There are well-known devices that utilize cylinder devices using fluid pressure such as pneumatic pressure or hydraulic pressure.
Depending on the size of the workpiece and the finishing conditions, a high pressure force of about 500 kg or a low pressure force of about 3 kg may be required for the polishing. If a fluid pressure cylinder device is used to apply pressure over a wide range of pressure, it is difficult to control the extremely low pressure of the pressure reducing valve, especially when the pressure is low, and the resistance of the piston seal and rod seal is large, so it may not operate. Therefore, it was virtually impossible to apply extremely low pressure.

In view of the above-mentioned conventional circumstances, the present invention is characterized in that two fluid pressure cylinder devices, one for high pressurization and one for low pressurization, are connected in series via an L-shaped lever, thereby making it possible to apply pressurizing forces over a wide range. This will be explained below based on the drawings.

1 and 2 show an embodiment of the present invention. FIG. 1 is a front view of the main part, and FIG. 2 is a perspective view of the same. A pressure shaft 4 having a pressure plate 3 attached to its lower end is disposed vertically above the lower surface plate 2, and a horizontal arm-shaped frame. 5 and is held movably in the vertical direction.

The base end of the frame 5 is attached to a pivot shaft (not shown) that is pivotally supported by a vertical cylindrical column 6 fixed on the bed 1, and the pressure plate 3 is moved by a pivot motor (not shown).
The lower surface plate 2 can be rotated (swung) over a range of 60°, for example.

Further, a drive shaft is passed through the inside of the turning shaft, and the pressure shaft 4 is made rotatable from a rotating device such as a continuously variable speed motor directly connected to the lower part via a reduction gear built into the frame 5. The pressurizing shaft 4 is, for example, a ball spline shaft to minimize resistance during axial movement.

Then, a thin plate or the like of the workpiece is attached to the lower surface of the pressure plate 3 using, for example, a vacuum chuck method, and is pressed with a predetermined pressure against a cloth attached to the lower surface plate 2 to polish the surface. A vertical arm 10 of an L-shaped lever 9 has a high pressurizing fluid pressure cylinder device 7 mounted on the frame 5 in a substantially horizontal direction, and the tip of the rod 8 is pivoted at its fulcrum to the rear end of the frame 5. The central part of a balance-like lever 13 is pivotally connected to the bracket 12 which is pivotally attached to the upper end part and fixed on both sides of the frame 5 over the cylinder device 7, and one end of the balance-like lever 13 is fixed to the bracket 12. The upper end of the pressure shaft 4 is pivotally connected by a sliding pin 15 via a bearing case 14 having a sliding groove on the outer periphery, and the other end of the balance-shaped lever 13 and the tip of the horizontal arm 11 of the lever-shaped lever 9 It is connected via a low pressurization fluid pressure cylinder device 16 arranged almost vertically between the two parts.

That is, as shown in FIG. 3, the upper part of the low pressurization fluid pressure cylinder device 16 is held so as to be slidable in the vertical direction within the cylindrical pressure metal fitting 22 with the cylinder 18 portion facing upward.
A load cell 24 is attached to the central lower surface of a lid-like load cell mounting plate 23 fixed to the upper end surface of the cylinder cover 19, and its contact tip is brought into contact with a plug 20 fixed to the center of the cylinder cover 19. Pin parts 25 protruding from both sides of the lower part of the pressurizing hardware 22 are pivotally connected to the other end of the balance-shaped lever 13, and when fluid pressure is actuated in the cylinder 18, the cylinder 18 rises with respect to the rod 17. Then, the plug 20 in the center of the cylinder cover 19 comes into contact with the contact of the load cell 24, and the pressurizing force in that case is applied to the balance lever 13 through the load cell 24, the load cell mounting plate 23, the pressurizing hardware 22, and the pin part 25. The other end is pushed up, and the upper end of the pressure shaft 4 is pushed down to apply pressure to the pressure plate 3. In this case, the pressure can be directly measured by the load cell 24. Can be done.

Next, when the high pressurization fluid pressure cylinder device 7 is activated, the upper end of the vertical arm 10 of the above-mentioned lever 9 is pulled in the direction of the arrow, and the tip of the horizontal arm 11 with a leverage ratio of 3:1, for example. The lower end of the rod 17 is pushed up by three times the thrust, and its upper end pushes up the plug 20 of the cylinder cover 19, and the same sequence as above applies to apply a high pressure to the pressure plate 3.

Each of the cylinder devices 7 and 16 is a bellofram type air cylinder device so as to have low frictional resistance.
Although it is designed to apply a pressurizing force of 1 kg, if frictional resistance is not a problem, other types or other hydraulic or water pressure cylinder devices may be used.

Note that the rod 17 of the low pressurization fluid pressure cylinder device 16
As shown in FIG. 4, the lower end part is provided with a bendable pivot part 27 at the center upper part of the swing shaft 26 which pivotally supports pin parts on both sides at the tip of the horizontal arm 11 of the L-shaped lever 9. In this case, it acts like a single rod and withstands the low pressure and high pressure, and the swing shaft 26 is rotated by the swing motor 28 attached to one side of the L-shaped lever 9 as shown in FIG. When the rod 17 is rotated about half a turn as shown in the figure, the middle part of the rod 17 is bent and pulled down, and the pressure plate 3 on the opposite side is raised to facilitate attachment and detachment of the workpiece.For example, the lower surface plate 2 can be raised and lowered. In such a case, the lower end of the rod 17 may be pivoted directly to the tip of the horizontal arm 11.

In addition, when calculating the pressurizing force acting on the pressure plate 3 from the pressure value of the fluid actuated in each cylinder device 7, 16, the load cell 24 is omitted and the cylinder 18 of the low pressurization fluid pressure cylinder device 16 is directly connected to the balance. The cylinder 18 and the cylinder cover 19 may be made of aluminum so that the low pressurization fluid pressure cylinder device 16 operates sensitively at extremely low pressurization, or In order to balance the displayed pressure of the load cell 24 and the pressing force acting on the pressure plate 3, a balance weight 29 may be provided above the load cell mounting plate 23, for example.

Since the present invention is configured as described above, it is possible to accurately and easily deal with a wide range of pressurization forces, not only high pressurization but also especially extremely low pressurization.

[Brief explanation of the drawing]

1 to 5 show an embodiment of the present invention, in which FIG. 1 is a front view of the main part, FIG. 2 is a perspective view of the same, FIG. 3 is a vertical sectional view of part III of FIG. The figure is an exploded front view of part IV in Figure 1, and part 5.
The figure is an explanatory diagram of the moving state of section IV in FIG. 1. 1: Bed, 2: Lower surface plate, 3: Pressure plate, 4: Pressure shaft, 5
: Frame, 6: Column, 7: Fluid pressure cylinder device for high pressurization, 8: Rod, 9: L-shaped bar, 10: Vertical arm, 11: Horizontal arm, 12 Nib bracket, 13: Balance lever, 14 : Bearing case, 15: Slip pin, 16: Low pressure fluid pressure cylinder device, 17: Rod, 18 Niji cylinder, 19 Niji cylinder cover, 20: Plug, 21: Verofram, 22: Pressure hardware, 23: Load cell mounting plate , 24: Load cell, 25: Pin portion, 26: Swing shaft, 27: Pivot portion, 28: Swing motor, 29: Balance weight.

Claims (1)

[Scope of utility model registration request] A pressurizing shaft 4 with a pressurizing plate 3 attached to the lower end thereof is held at the tip of a horizontal arm-shaped frame 5 so as to be movable in the vertical direction, and a fluid pressure cylinder device 7 for high pressurization is attached on the frame 5 in a substantially horizontal direction. The tip of the rod 8 is pivoted to the upper end of a vertical arm 10 of an L-shaped lever 9 whose fulcrum is pivoted to the rear end of the frame 5, and the center part is pivoted to the bracket 12 fixed on the frame 5. The upper end of the pressurizing shaft 4 is pivotally connected to one end of the lever-shaped lever 13, and the other end of the lever-shaped lever 13 and the tip of the horizontal arm 11 of the lever-shaped lever 9 are connected to a low pressure fluid. A pressure device in a surface polishing machine, characterized in that it is connected via a pressure cylinder device 16.