JPS58150452U - Pressure device in surface polishing machine - Google Patents
Pressure device in surface polishing machineInfo
- Publication number
- JPS58150452U JPS58150452U JP1982048762U JP4876282U JPS58150452U JP S58150452 U JPS58150452 U JP S58150452U JP 1982048762 U JP1982048762 U JP 1982048762U JP 4876282 U JP4876282 U JP 4876282U JP S58150452 U JPS58150452 U JP S58150452U
- Authority
- JP
- Japan
- Prior art keywords
- pressurizing
- frame
- tip
- polishing machine
- pivotally connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図〜第５図は本考案の一実施例を示し、第１図は要
部正面図、第２図は同斜視図、第３図は第１図■部の縦
断面図、第４図は第１図■部の分解正面図、第５図は第
１図■部の移動状態説明図である。
１：ベッド、２：下定盤、３：加圧板、４：加圧軸、５
：フレーム、６：コラム、７：高加圧用流体圧シリ１
ンダ装置、８：ロッド、９：Ｌ形レバー、１０：垂直状
アーム、１１：水平状アーム、１２ニブラケツト、１３
：天びん状レバー、１４：ベアリングケース、１５：す
べりピン、１６：低加圧用流体圧シリンダ装置、１７：
０ツド、１８ニジリンダ、１９ニジリンダカバー、２０
：栓、２１：ベロフラム、２２：加圧金物、２３：ロー
ドセル取付板、２４：ロードセル、２５：ピン部、２６
：揺動軸、２７：枢着部、２Ｂ：揺動モータ、２９：バ
ランスウェイト。1 to 5 show an embodiment of the present invention, in which FIG. 1 is a front view of the main part, FIG. 2 is a perspective view of the same, FIG. 3 is a vertical sectional view of part The figure is an exploded front view of the section ■ in FIG. 1, and FIG. 5 is an explanatory diagram of the moving state of the section ■ in FIG. 1. 1: Bed, 2: Lower surface plate, 3: Pressure plate, 4: Pressure shaft, 5
: Frame, 6: Column, 7: High pressure fluid pressure series 1
holder device, 8: rod, 9: L-shaped lever, 10: vertical arm, 11: horizontal arm, 12 nib bracket, 13
: Balance lever, 14: Bearing case, 15: Sliding pin, 16: Fluid pressure cylinder device for low pressurization, 17:
0 Tsudo, 18 Niji Linda, 19 Niji Linda Cover, 20
: Plug, 21: Bellofram, 22: Pressure hardware, 23: Load cell mounting plate, 24: Load cell, 25: Pin part, 26
: Swing shaft, 27: Pivot joint, 2B: Swing motor, 29: Balance weight.
Claims (1)
フレーム５の先端部に垂直方向移動自在に保持し、前記
フレーム５上にほぼ水平方向に装着した高加圧用流体圧
シリンダ装置７のロッド８先端部を、前記フレーム５後
端部に支点を枢着したＬ形レバー９の垂直状アーム１０
上端部に枢着し、前記フレーム５上に固着したブラケッ
ト１２に中央部を枢着した天びん状レバー１３の一端部
に前記加圧軸４の上端部を枢着し、天びん状レバー１３
の他端部と前記り形レバー９の水平状アーム１１の先端
部とを低加圧用流体圧シリンダ装置１６を介して連結し
たことを特徴とする表面研磨機における加圧装置。A pressurizing shaft 4 with a pressurizing plate 3 attached to its lower end is held at the tip of a horizontal arm-shaped frame 5 so as to be movable in the vertical direction, and a high pressurizing fluid pressure shaft is attached almost horizontally on the frame 5. A vertical arm 10 of an L-shaped lever 9 whose fulcrum is pivotally connected to the rear end of the frame 5 with the tip of the rod 8 of the cylinder device 7
The upper end of the pressurizing shaft 4 is pivotally connected to one end of a balance-shaped lever 13 whose center portion is pivotally connected to a bracket 12 fixed on the frame 5.
A pressurizing device for a surface polishing machine, characterized in that the other end and the tip of the horizontal arm 11 of the above-described lever 9 are connected via a low pressurizing fluid pressure cylinder device 16.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982048762U JPS5936364Y2 (en) | 1982-04-02 | 1982-04-02 | Pressure device in surface polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982048762U JPS5936364Y2 (en) | 1982-04-02 | 1982-04-02 | Pressure device in surface polishing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58150452U true JPS58150452U (en) | 1983-10-08 |
| JPS5936364Y2 JPS5936364Y2 (en) | 1984-10-06 |
Family
ID=30059667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982048762U Expired JPS5936364Y2 (en) | 1982-04-02 | 1982-04-02 | Pressure device in surface polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5936364Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63237864A (en) * | 1987-03-23 | 1988-10-04 | ジェラルド エル ジル ジュニア | Device for polishing surface of thin wafer |
-
1982
- 1982-04-02 JP JP1982048762U patent/JPS5936364Y2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63237864A (en) * | 1987-03-23 | 1988-10-04 | ジェラルド エル ジル ジュニア | Device for polishing surface of thin wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5936364Y2 (en) | 1984-10-06 |
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