JPS62190340U - - Google Patents

Info

Publication number
JPS62190340U
JPS62190340U JP1986078202U JP7820286U JPS62190340U JP S62190340 U JPS62190340 U JP S62190340U JP 1986078202 U JP1986078202 U JP 1986078202U JP 7820286 U JP7820286 U JP 7820286U JP S62190340 U JPS62190340 U JP S62190340U
Authority
JP
Japan
Prior art keywords
ray
thin film
absorber pattern
support frame
convex portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986078202U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986078202U priority Critical patent/JPS62190340U/ja
Publication of JPS62190340U publication Critical patent/JPS62190340U/ja
Pending legal-status Critical Current

Links

JP1986078202U 1986-05-26 1986-05-26 Pending JPS62190340U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986078202U JPS62190340U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986078202U JPS62190340U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Publications (1)

Publication Number Publication Date
JPS62190340U true JPS62190340U (enrdf_load_stackoverflow) 1987-12-03

Family

ID=30926925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986078202U Pending JPS62190340U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Country Status (1)

Country Link
JP (1) JPS62190340U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54142071A (en) * 1978-04-27 1979-11-05 Cho Lsi Gijutsu Kenkyu Kumiai Method of fabricating xxray exposure mask
JPS58207635A (ja) * 1982-05-28 1983-12-03 Seiko Epson Corp メンブラン・マスクの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54142071A (en) * 1978-04-27 1979-11-05 Cho Lsi Gijutsu Kenkyu Kumiai Method of fabricating xxray exposure mask
JPS58207635A (ja) * 1982-05-28 1983-12-03 Seiko Epson Corp メンブラン・マスクの製造方法

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