JPS62190336U - - Google Patents
Info
- Publication number
- JPS62190336U JPS62190336U JP7987786U JP7987786U JPS62190336U JP S62190336 U JPS62190336 U JP S62190336U JP 7987786 U JP7987786 U JP 7987786U JP 7987786 U JP7987786 U JP 7987786U JP S62190336 U JPS62190336 U JP S62190336U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- scanning
- optical system
- scanning means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001182 laser chemical vapour deposition Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7987786U JPS62190336U (enExample) | 1986-05-26 | 1986-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7987786U JPS62190336U (enExample) | 1986-05-26 | 1986-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190336U true JPS62190336U (enExample) | 1987-12-03 |
Family
ID=30930162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7987786U Pending JPS62190336U (enExample) | 1986-05-26 | 1986-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190336U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55150224A (en) * | 1979-05-11 | 1980-11-22 | Hitachi Ltd | Apparatus for printing pattern |
| JPS5961920A (ja) * | 1982-10-01 | 1984-04-09 | Agency Of Ind Science & Technol | 薄膜製造方法およびその装置 |
-
1986
- 1986-05-26 JP JP7987786U patent/JPS62190336U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55150224A (en) * | 1979-05-11 | 1980-11-22 | Hitachi Ltd | Apparatus for printing pattern |
| JPS5961920A (ja) * | 1982-10-01 | 1984-04-09 | Agency Of Ind Science & Technol | 薄膜製造方法およびその装置 |
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