JPS62190336U - - Google Patents

Info

Publication number
JPS62190336U
JPS62190336U JP7987786U JP7987786U JPS62190336U JP S62190336 U JPS62190336 U JP S62190336U JP 7987786 U JP7987786 U JP 7987786U JP 7987786 U JP7987786 U JP 7987786U JP S62190336 U JPS62190336 U JP S62190336U
Authority
JP
Japan
Prior art keywords
laser
laser beam
scanning
optical system
scanning means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7987786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7987786U priority Critical patent/JPS62190336U/ja
Publication of JPS62190336U publication Critical patent/JPS62190336U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7987786U 1986-05-26 1986-05-26 Pending JPS62190336U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7987786U JPS62190336U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7987786U JPS62190336U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Publications (1)

Publication Number Publication Date
JPS62190336U true JPS62190336U (enrdf_load_stackoverflow) 1987-12-03

Family

ID=30930162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7987786U Pending JPS62190336U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Country Status (1)

Country Link
JP (1) JPS62190336U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55150224A (en) * 1979-05-11 1980-11-22 Hitachi Ltd Apparatus for printing pattern
JPS5961920A (ja) * 1982-10-01 1984-04-09 Agency Of Ind Science & Technol 薄膜製造方法およびその装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55150224A (en) * 1979-05-11 1980-11-22 Hitachi Ltd Apparatus for printing pattern
JPS5961920A (ja) * 1982-10-01 1984-04-09 Agency Of Ind Science & Technol 薄膜製造方法およびその装置

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