JPS62189399A - 液体移送ポンプ - Google Patents

液体移送ポンプ

Info

Publication number
JPS62189399A
JPS62189399A JP3037286A JP3037286A JPS62189399A JP S62189399 A JPS62189399 A JP S62189399A JP 3037286 A JP3037286 A JP 3037286A JP 3037286 A JP3037286 A JP 3037286A JP S62189399 A JPS62189399 A JP S62189399A
Authority
JP
Japan
Prior art keywords
liquid
casing
box
pump
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3037286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574717B2 (enrdf_load_stackoverflow
Inventor
Tateki Furukawa
古川　千城
Shinjiro Ando
安藤　信治郎
Nariaki Oota
太田　成昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP3037286A priority Critical patent/JPS62189399A/ja
Publication of JPS62189399A publication Critical patent/JPS62189399A/ja
Publication of JPH0574717B2 publication Critical patent/JPH0574717B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Structures Of Non-Positive Displacement Pumps (AREA)
JP3037286A 1986-02-14 1986-02-14 液体移送ポンプ Granted JPS62189399A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3037286A JPS62189399A (ja) 1986-02-14 1986-02-14 液体移送ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3037286A JPS62189399A (ja) 1986-02-14 1986-02-14 液体移送ポンプ

Publications (2)

Publication Number Publication Date
JPS62189399A true JPS62189399A (ja) 1987-08-19
JPH0574717B2 JPH0574717B2 (enrdf_load_stackoverflow) 1993-10-19

Family

ID=12302042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3037286A Granted JPS62189399A (ja) 1986-02-14 1986-02-14 液体移送ポンプ

Country Status (1)

Country Link
JP (1) JPS62189399A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03127099U (enrdf_load_stackoverflow) * 1990-04-03 1991-12-20
JPH0427796A (ja) * 1990-05-18 1992-01-30 Fuji Electric Co Ltd 液体移送ポンプ
US5246336A (en) * 1991-06-21 1993-09-21 Fuji Electric Co., Ltd. Motor driven complex pump apparatus

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6620723B1 (en) 2000-06-27 2003-09-16 Applied Materials, Inc. Formation of boride barrier layers using chemisorption techniques
US6551929B1 (en) 2000-06-28 2003-04-22 Applied Materials, Inc. Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques
US7405158B2 (en) 2000-06-28 2008-07-29 Applied Materials, Inc. Methods for depositing tungsten layers employing atomic layer deposition techniques
US7101795B1 (en) 2000-06-28 2006-09-05 Applied Materials, Inc. Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
US6765178B2 (en) 2000-12-29 2004-07-20 Applied Materials, Inc. Chamber for uniform substrate heating
US6998579B2 (en) 2000-12-29 2006-02-14 Applied Materials, Inc. Chamber for uniform substrate heating
US6951804B2 (en) 2001-02-02 2005-10-04 Applied Materials, Inc. Formation of a tantalum-nitride layer
US6878206B2 (en) 2001-07-16 2005-04-12 Applied Materials, Inc. Lid assembly for a processing system to facilitate sequential deposition techniques
US6734020B2 (en) 2001-03-07 2004-05-11 Applied Materials, Inc. Valve control system for atomic layer deposition chamber
US7211144B2 (en) 2001-07-13 2007-05-01 Applied Materials, Inc. Pulsed nucleation deposition of tungsten layers
US7085616B2 (en) 2001-07-27 2006-08-01 Applied Materials, Inc. Atomic layer deposition apparatus
US6936906B2 (en) 2001-09-26 2005-08-30 Applied Materials, Inc. Integration of barrier layer and seed layer
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US6916398B2 (en) 2001-10-26 2005-07-12 Applied Materials, Inc. Gas delivery apparatus and method for atomic layer deposition
US6911391B2 (en) 2002-01-26 2005-06-28 Applied Materials, Inc. Integration of titanium and titanium nitride layers
US6833161B2 (en) 2002-02-26 2004-12-21 Applied Materials, Inc. Cyclical deposition of tungsten nitride for metal oxide gate electrode
US7439191B2 (en) 2002-04-05 2008-10-21 Applied Materials, Inc. Deposition of silicon layers for active matrix liquid crystal display (AMLCD) applications
US7262133B2 (en) 2003-01-07 2007-08-28 Applied Materials, Inc. Enhancement of copper line reliability using thin ALD tan film to cap the copper line
KR20060079144A (ko) 2003-06-18 2006-07-05 어플라이드 머티어리얼스, 인코포레이티드 배리어 물질의 원자층 증착

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5286001U (enrdf_load_stackoverflow) * 1975-12-23 1977-06-27
JPS54206A (en) * 1977-06-02 1979-01-05 Kubota Ltd Shaft sealing device for underwater power unit
JPS5659999U (enrdf_load_stackoverflow) * 1979-10-13 1981-05-22
JPS60141495U (ja) * 1984-02-28 1985-09-19 アイシン精機株式会社 ウオ−タポンプの水切装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5286001U (enrdf_load_stackoverflow) * 1975-12-23 1977-06-27
JPS54206A (en) * 1977-06-02 1979-01-05 Kubota Ltd Shaft sealing device for underwater power unit
JPS5659999U (enrdf_load_stackoverflow) * 1979-10-13 1981-05-22
JPS60141495U (ja) * 1984-02-28 1985-09-19 アイシン精機株式会社 ウオ−タポンプの水切装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03127099U (enrdf_load_stackoverflow) * 1990-04-03 1991-12-20
JPH0427796A (ja) * 1990-05-18 1992-01-30 Fuji Electric Co Ltd 液体移送ポンプ
US5246336A (en) * 1991-06-21 1993-09-21 Fuji Electric Co., Ltd. Motor driven complex pump apparatus

Also Published As

Publication number Publication date
JPH0574717B2 (enrdf_load_stackoverflow) 1993-10-19

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