JPS62188774U - - Google Patents
Info
- Publication number
- JPS62188774U JPS62188774U JP7780686U JP7780686U JPS62188774U JP S62188774 U JPS62188774 U JP S62188774U JP 7780686 U JP7780686 U JP 7780686U JP 7780686 U JP7780686 U JP 7780686U JP S62188774 U JPS62188774 U JP S62188774U
- Authority
- JP
- Japan
- Prior art keywords
- light
- amount
- wavelength
- photoresist
- wavelength band
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 230000031700 light absorption Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7780686U JPS62188774U (enExample) | 1986-05-22 | 1986-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7780686U JPS62188774U (enExample) | 1986-05-22 | 1986-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188774U true JPS62188774U (enExample) | 1987-12-01 |
Family
ID=30926159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7780686U Pending JPS62188774U (enExample) | 1986-05-22 | 1986-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188774U (enExample) |
-
1986
- 1986-05-22 JP JP7780686U patent/JPS62188774U/ja active Pending
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