JPS62188774U - - Google Patents

Info

Publication number
JPS62188774U
JPS62188774U JP7780686U JP7780686U JPS62188774U JP S62188774 U JPS62188774 U JP S62188774U JP 7780686 U JP7780686 U JP 7780686U JP 7780686 U JP7780686 U JP 7780686U JP S62188774 U JPS62188774 U JP S62188774U
Authority
JP
Japan
Prior art keywords
light
amount
wavelength
photoresist
wavelength band
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7780686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7780686U priority Critical patent/JPS62188774U/ja
Publication of JPS62188774U publication Critical patent/JPS62188774U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Spectrometry And Color Measurement (AREA)
JP7780686U 1986-05-22 1986-05-22 Pending JPS62188774U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7780686U JPS62188774U (enrdf_load_stackoverflow) 1986-05-22 1986-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7780686U JPS62188774U (enrdf_load_stackoverflow) 1986-05-22 1986-05-22

Publications (1)

Publication Number Publication Date
JPS62188774U true JPS62188774U (enrdf_load_stackoverflow) 1987-12-01

Family

ID=30926159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7780686U Pending JPS62188774U (enrdf_load_stackoverflow) 1986-05-22 1986-05-22

Country Status (1)

Country Link
JP (1) JPS62188774U (enrdf_load_stackoverflow)

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