JPS62188135U - - Google Patents
Info
- Publication number
- JPS62188135U JPS62188135U JP7640086U JP7640086U JPS62188135U JP S62188135 U JPS62188135 U JP S62188135U JP 7640086 U JP7640086 U JP 7640086U JP 7640086 U JP7640086 U JP 7640086U JP S62188135 U JPS62188135 U JP S62188135U
- Authority
- JP
- Japan
- Prior art keywords
- door flange
- rings
- door
- quartz
- quartz tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7640086U JPH0530355Y2 (th) | 1986-05-21 | 1986-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7640086U JPH0530355Y2 (th) | 1986-05-21 | 1986-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62188135U true JPS62188135U (th) | 1987-11-30 |
| JPH0530355Y2 JPH0530355Y2 (th) | 1993-08-03 |
Family
ID=30923441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7640086U Expired - Lifetime JPH0530355Y2 (th) | 1986-05-21 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530355Y2 (th) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023127054A1 (ja) * | 2021-12-27 | 2023-07-06 | 株式会社Kokusai Electric | 漏洩検知装置、半導体装置の製造方法、基板処理方法およびプログラム |
-
1986
- 1986-05-21 JP JP7640086U patent/JPH0530355Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023127054A1 (ja) * | 2021-12-27 | 2023-07-06 | 株式会社Kokusai Electric | 漏洩検知装置、半導体装置の製造方法、基板処理方法およびプログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530355Y2 (th) | 1993-08-03 |